Ultrathick SU-8 fabrication for microreciprocating engines

Peng Jin; Kyle C. Jiang; Nianjun Sun

doi:10.1117/1.1793155

1 October 2004 Ultrathick SU-8 fabrication for microreciprocating engines

Peng Jin, Kyle C. Jiang, Nianjun Sun

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 4, (October 2004). https://doi.org/10.1117/1.1793155

Abstract

We present a high-quality UV-lithography process for making high aspect ratio microstructures for microengines using an ultrathick SU-8 photoresist layer. The microreciprocating engine project, which is ongoing at the University of Birmingham, aims to develop a compact power plant to replace batteries. The design of the microengine imposes strict requirements on the geometry of the engine components. The microfabrication research work has been concentrated on developing a SU-8 UV-lithography process to achieve good sidewall angles and high aspect ratio. Based on the study of the photoactive property of ultrathick SU-8 layers, an optimized prebake time is found for obtaining the minimum UV absorption of SU-8. The optimization process is tested and proven effective using a series of UV-lithography experiments on different prebake times. Microstructures with aspect ratios as high as 40:1 are produced in 1000-µm ultrathick SU-8 layers using standard UV-lithography equipment. The sidewall angles are controlled between 85 to 90 deg. The engine components fabricated using this process satisfy microengine design requirements.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Peng Jin, Kyle C. Jiang, and Nianjun Sun "Ultrathick SU-8 fabrication for microreciprocating engines," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(4), (1 October 2004). https://doi.org/10.1117/1.1793155

Published: 1 October 2004

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