A method of tapering waveguides using fixed-electronic-beam-moving-stage (FBMS) paths is presented. The tapering is achieved by joining two FBMS paths to a common point. Compared to conventional area and FBMS tapering methods, the proposed method offers smooth and alignment-error-free tapering between waveguides of different widths. We experimentally demonstrate a fully functional FBMS patterned photonic circuit with a power splitter, wire-to-slot coupler, slot waveguide, and a slotted ring resonator. The device response with an insertion loss of −1.35 dB is measured around 1550-nm wavelength. |
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CITATIONS
Cited by 3 scholarly publications.
Waveguides
Lithography
Photonic integrated circuits
Electron beam lithography
Resonators
Scanning electron microscopy
Electron beams