Silicon grating microfabrication for long-range displacement sensor

Ali Khiat; F. Lamarque; C. Prelle; A. Phataralaoha; Jan Dittmer; T. Krah; Monika Leester-Schaedel; Stephanus Büttgenbach

doi:10.1117/1.2909459

1 April 2008 Silicon grating microfabrication for long-range displacement sensor

Ali Khiat, F. Lamarque, C. Prelle, A. Phataralaoha, Jan Dittmer, T. Krah, Monika Leester-Schaedel, Stephanus Büttgenbach

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 2, 021007 (April 2008). https://doi.org/10.1117/1.2909459

Abstract

Silicon gratings are fabricated using micromachining techniques. The gratings are used with fiber optic probes to measure high-resolution and long-range linear displacements. Different parameters of the fabrication process such as the etching solution, the concentration of the etchant, and the temperature are optimized to achieve a mirror-like surface quality of the grating steps. For each parameter set, the resulting roughness and flatness are analyzed and discussed. Finally, linear displacement measurements are performed with the optimized grating as a component of a long-range fiber optic sensor. A resolution better than 34 nm and a measurement range up to 8.7 mm are obtained.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ali Khiat, F. Lamarque, C. Prelle, A. Phataralaoha, Jan Dittmer, T. Krah, Monika Leester-Schaedel, and Stephanus Büttgenbach "Silicon grating microfabrication for long-range displacement sensor," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(2), 021007 (1 April 2008). https://doi.org/10.1117/1.2909459

Published: 1 April 2008

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