Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer

Ke-Min Liao; Rongshun Chen

doi:10.1117/1.2959849

1 July 2008 Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer

Ke-Min Liao, Rongshun Chen

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 3, 033011 (July 2008). https://doi.org/10.1117/1.2959849

Abstract

We report a novel prototype of a two-dimensional micromachined accelerometer based on thermocapillary heat transfer. The only moving element in this accelerometer is a thermal bubble generated by vaporizing the working liquid in the microchamber. The accelerometer consists of two key components, a heating resistor for creating symmetrical temperature profiles and two pairs of temperature detectors placed symmetrically and orthogonally to each other. The prototype devices demonstrate that a sensitivity of 1.5°C/g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing deionized water is 200 Hz, and the corresponding noise equivalent acceleration is ~1 mg/Hz^1/2.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ke-Min Liao and Rongshun Chen "Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(3), 033011 (1 July 2008). https://doi.org/10.1117/1.2959849

Published: 1 July 2008

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