Alternative To Ellipsometry For Characterizing Transparent Planar Thin Films

A. R. Reisinger; H. B. Morris; K. L. Lawley

doi:10.1117/12.7972673

1 February 1981 Alternative To Ellipsometry For Characterizing Transparent Planar Thin Films

A. R. Reisinger, H. B. Morris, K. L. Lawley

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Optical Engineering, Vol. 20, Issue 1, 201111 (February 1981). https://doi.org/10.1117/12.7972673

Abstract

We describe a simple technique, based on the method of Abeles, for routine measurements of the refractive index and the thickness of transparent planar thin films. The optical and electronic hardware required to implement the technique involves only standard equipment available in most laboratories. The results obtained with this method are compared with ellipsometric measurements.

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A. R. Reisinger, H. B. Morris, and K. L. Lawley "Alternative To Ellipsometry For Characterizing Transparent Planar Thin Films," Optical Engineering 20(1), 201111 (1 February 1981). https://doi.org/10.1117/12.7972673

Published: 1 February 1981

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