Film/substrate/vacuum-chuck interactions during spin-coating

Dunbar P. Birnie III; Brian J.J. Zelinski; Stuart P. Marvel; Sharon M. Melpolder; Ronald L. Roncone

doi:10.1117/12.59901

1 September 1992 Film/substrate/vacuum-chuck interactions during spin-coating

Dunbar P. Birnie III, Brian J.J. Zelinski, Stuart P. Marvel, Sharon M. Melpolder, Ronald L. Roncone

Author Affiliations +

Optical Engineering, Vol. 31, Issue 9, (September 1992). https://doi.org/10.1117/12.59901

Abstract

Thickness variations that are associated with the vacuum chuck were observed in wet-chemical-derived dielectric films applied by the spin-coating technique. These thickness variations are controlled by factors such as the thermal properties of the substrate material, the evaporation behavior of the coating solution, and the physical design of the vacuum chuck. Atechnique is described for evaluating the magnitude ofthis effect.

Citation Download Citation

Dunbar P. Birnie III, Brian J.J. Zelinski, Stuart P. Marvel, Sharon M. Melpolder, and Ronald L. Roncone "Film/substrate/vacuum-chuck interactions during spin-coating," Optical Engineering 31(9), (1 September 1992). https://doi.org/10.1117/12.59901

Published: 1 September 1992

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