Precision calibration and systematic error reduction in the long trace profiler

Shinan Qian; Giovanni Sostero; Peter Z. Takacs

doi:10.1117/1.602364

1 January 2000 Precision calibration and systematic error reduction in the long trace profiler

Shinan Qian, Giovanni Sostero, Peter Z. Takacs

Optical Engineering, Vol. 39, Issue 1, (January 2000). https://doi.org/10.1117/1.602364

The long trace profiler (LTP) has become the instrument of choice for surface figure testing and slope error measurement of mirrors used for synchrotron radiation and x-ray astronomy optics. In order to achieve highly accurate measurements with the LTP, systematic errors need to be reduced by precise angle calibration and accurate focal plane position adjustment. A self-scanning method is presented to adjust the focal plane position of the detector with high precision by use of a pentaprism scanning technique. The focal plane position can be set to better than 0.25 mm for a 1250-mm-focal-length Fourier-transform lens using this technique. The use of a 0.03-arcsec-resolution theodolite combined with the sensitivity of the LTP detector system can be used to calibrate the angular linearity error very precisely. Some suggestions are introduced for reducing the system error. With these precision calibration techniques, accuracy in the measurement of figure and slope error on meter-long mirrors is now at a level of about 1 µrad rms over the whole testing range of the LTP.

Citation Download Citation

Shinan Qian, Giovanni Sostero, and Peter Z. Takacs "Precision calibration and systematic error reduction in the long trace profiler," Optical Engineering 39(1), (1 January 2000). https://doi.org/10.1117/1.602364

Published: 1 January 2000

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available