Development of non-imaging optics for particle counters

J. Luo; A. Trampe; Heinz Fissan

doi:10.1117/1.602455

1 April 2000 Development of non-imaging optics for particle counters

J. Luo, A. Trampe, Heinz Fissan

Optical Engineering, Vol. 39, Issue 4, (April 2000). https://doi.org/10.1117/1.602455

A nonimaging optical system is developed for particle detection in an optical particle counter (OPC) with a large measurement plane, the kind of OPC required to control particle contamination in clean process gases used in chip manufacture. The measurement plane must cover the whole cross section of the gas pipe to be able to detect each particle. In a conventional OPC with imaging detection optics, local dependence of the particle signal is caused by the inhomogeneity of light intensity in the measurement plane as well as by local dependence of the angle of the detected scattered light. However, most important is the local signal dependence caused by the imaging detection optics. Using nonimaging elements reduces local dependence of the scattered light signal which is caused by the imaging optics. The work carried out on nonimaging light concentrators for particle detection is described. We discuss the advantages of using light concentrators, summarize the optical theory of light concentration and investigate the optical characteristics of light concentrators. Through theoretical as well as experimental tests, we show that the local deviation is less than ±25.6% for a homogenous light intensity distribution in the measurement plane.

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J. Luo, A. Trampe, and Heinz Fissan "Development of non-imaging optics for particle counters," Optical Engineering 39(4), (1 April 2000). https://doi.org/10.1117/1.602455

Published: 1 April 2000

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