1 February 2007 Influence of polishing and cleaning on the laser-induced damage threshold of substrates and coatings at 1064 nm
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Abstract
Laser-induced damage threshold (LIDT) results on silica substrates and coatings are presented for near-infrared applications. Different polishing and cleaning processes are evaluated. In particular, we investigate the influence of polishing and cleaning on the LIDT of silica substrates and optical coatings deposited by dual-ion-beam sputtering. Laser damage tests were performed at 1064 nm with a 5-ns-pulse Nd:YAG laser, and experiments were made on surfaces of optical components using a 12-μm-diameter focused beam. Accurate damage probability curves are plotted thanks to a reliable statistical measurement of laser damage. Use of a statistical model permits us to deduce the densities of laser damage precursors. We find a significant improvement of the LIDT of our coatings on choosing the appropriate cleaning and polishing process.
©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Helene T. Krol, Laurent Gallais, Mireille Commandré, Catherine M. Grèzes-Besset, Didier Torricini, and Guy Lagier "Influence of polishing and cleaning on the laser-induced damage threshold of substrates and coatings at 1064 nm," Optical Engineering 46(2), 023402 (1 February 2007). https://doi.org/10.1117/1.2542122
Published: 1 February 2007
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Cited by 19 scholarly publications.
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KEYWORDS
Polishing

Laser induced damage

Silica

Resistance

Laser damage threshold

Optical coatings

Thin films

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