Dr. Aihuan Dun Profile

Dr. Aihuan Dun

at Shanghai Institute of Optics and Fine Mechanics

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Author

Publications (11)

Proceedings Article | 10 October 2020 Poster + Paper

Study on dwell time compensation method of atmospheric pressure plasma processing

Zhe Wang, Lingqi Wu, Chen Hu, Lunzhe Wu, Bing Peng, Aihuan Dun, Xueke Xu, Xiaolei Zhu

Proceedings Volume 11548, 115481L (2020) https://doi.org/10.1117/12.2573825

KEYWORDS: Atmospheric plasma, Plasma, Diffractive optical elements, High power lasers, Polishing, Chemical analysis, Chemical reactions, Surface finishing, Chemical elements

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Proceedings Article | 10 October 2020 Poster + Paper

An innovative chemical mechanical polishing slurry for sesquioxides crystal (Yb:LuScO3)

Yuanyuan Fang, Bing Peng, Aihuan Dun, Hongbo He, Long Zhang

Proceedings Volume 11548, 115481F (2020) https://doi.org/10.1117/12.2573554

KEYWORDS: Crystals, Chemical mechanical planarization, Surface finishing, Polishing, Urea, X-ray diffraction, Laser crystals, Phonons, Picosecond phenomena, Femtosecond phenomena

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Proceedings Article | 31 January 2020 Paper

Removal function and chemical composition of RS-SiC surface processing by atmospheric pressure plasma processing

Li Song, Xueke Xu, Aihuan Dun, Lunzhe Wu, Zhe Wang

Proceedings Volume 11427, 114272I (2020) https://doi.org/10.1117/12.2552352

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Proceedings Article | 6 February 2019 Paper

Precision manufacturing technology of axicon

Yanchao Zhang, Xueke Xu, Jun Cao, Fulin Wu, Aihuan Dun, Jianda Shao

Proceedings Volume 10842, 1084212 (2019) https://doi.org/10.1117/12.2505900

KEYWORDS: Atmospheric plasma, Polishing, Plasma, Axicons, Surface finishing, Chemical reactions, Atmospheric particles, Optics manufacturing, Mirrors, Chemical species

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Proceedings Article | 30 January 2019 Paper

Research of the mist phenomenon on phosphate glass surface

Jun Cao, Xueke Xu, Yanchao Zhang, Aihuan Dun, Jianda Shao

Proceedings Volume 10841, 1084110 (2019) https://doi.org/10.1117/12.2505899

KEYWORDS: Glasses, Polishing, Surface finishing, Liquids, Light scattering, Chemical elements, Aluminum, Neodymium, Solids

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Proceedings Article | 8 March 2017 Paper

Experimental research of the deterministic controlling process of surface figure in the large-aperture annular polishing

Minghong Yang, Jianda Shao, Xueke Xu, Aihuan Dun, Lunzhe Wu, Yan Zhang, Jun Cao, Yang Zhang, Zhe Wang

Proceedings Volume 10255, 102551G (2017) https://doi.org/10.1117/12.2268116

KEYWORDS: Polishing, Process control, Surface finishing, Glasses, Temperature metrology, Humidity, Control systems, Polishing equipment, Optical components, Monochromatic aberrations

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Proceedings Article | 30 June 2016 Paper

Numerical simulation of pitch button blocking optimization

Lunzhe Wu, Wenlan Gao, Aihuan Dun, Minghong Yang, Chaoyang Wei, Xueke Xu, Jianda Shao

Proceedings Volume 10009, 1000911 (2016) https://doi.org/10.1117/12.2236356

KEYWORDS: Finite element methods, Numerical simulations, Polishing, Photovoltaics, Surface finishing, Stress analysis, Materials science, Mechanics, Roads, Thermal modeling

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Proceedings Article | 12 October 2015 Paper

Polishing performances of different optics with different size powder and different pH value slurries during CMP polishing

Jun Cao, Chaoyang Wei, Shijie Liu, Aihuan Dun, Minghong Yang, Xueke Xu, Jianda Shao

Proceedings Volume 9633, 96332O (2015) https://doi.org/10.1117/12.2218455

KEYWORDS: Glasses, Polishing, Surface finishing, Silica, Particles, Ions, Silicon, Chemical mechanical planarization, Silicate glass, Interferometers

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Proceedings Article | 27 August 2015 Paper

Influence of temperature difference on surface figure controlling during continuous polishing

Meijuan Hong, Xueke Xu, Aihuan Dun, Minghong Yang, Wenlan Gao, Chaoyang Wei, Shijie Liu, Jianda Shao, Yang Zhang

Proceedings Volume 9575, 95750S (2015) https://doi.org/10.1117/12.2189142

KEYWORDS: Polishing, Temperature metrology, Surface finishing, Photovoltaics, Ions, Infrared imaging, Thermography, Infrared radiation, Imaging systems, Aluminum

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Proceedings Article | 6 August 2014 Paper

The real-time monitoring surface figure of optical elements in continuous polishing

Jun Chen, Xueke Xu, Chaoyang Wei, Jianxun Gu, Aihuan Dun, Jianda Shao

Proceedings Volume 9281, 92810L (2014) https://doi.org/10.1117/12.2069754

KEYWORDS: Surface finishing, Polishing, Computing systems, Interferometers, Photovoltaics, Optical components, Glasses, Mirrors, Wavefronts, Optics manufacturing

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Proceedings Article | 6 August 2014 Paper

Research on mid-frequency errors in Nd-doped glass continuous polishing

Jun Cao, Aihuan Dun, Chaoyang Wei, Jianxun Gu, Jianda Shao

Proceedings Volume 9281, 92810K (2014) https://doi.org/10.1117/12.2069765

KEYWORDS: Polishing, Glasses, Surface finishing, Optical components, Error analysis, Polishing equipment, Semiconducting wafers, Photovoltaics, Liquids, National Ignition Facility

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Showing 5 of 11 publications

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