Dr. Akiko Hirai Profile

Dr. Akiko Hirai

Researcher at National Institute of Advanced Industrial Science and Technology

SPIE Involvement:

Author

Publications (26)

Proceedings Article | 10 April 2024 Presentation

AFM observation of EUV photoresist shrinkage due to electron-beam exposure

Ryosuke Kizu, Kazuhiro Kumagai, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

Proceedings Volume 12955, 129551U (2024) https://doi.org/10.1117/12.3010107

KEYWORDS: Shrinkage, Photoresist materials, Extreme ultraviolet lithography, Atomic force microscopy

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SPIE Journal Paper | 7 December 2023

Evaluation of the change in photoresist sidewall roughness due to electron beam-induced shrinkage using atomic force microscopy

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

JM3, Vol. 22, Issue 04, 044002, (December 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.044002

KEYWORDS: Shrinkage, Photoresist materials, Line edge roughness, Scanning electron microscopy, Atomic force microscopy, 3D metrology, Lithography, Metrology, Fractal analysis, Electron beams

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Proceedings Article | 27 April 2023 Presentation + Paper

Photoresist shrinkage observation by a metrological tilting-AFM

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

Proceedings Volume 12496, 1249605 (2023) https://doi.org/10.1117/12.2655566

KEYWORDS: Shrinkage, Photoresist materials, Line edge roughness, Scanning electron microscopy, Atomic force microscopy, Metrology, Lithography, Deformation, Critical dimension metrology, 3D metrology

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Proceedings Article | 13 June 2022 Presentation

High-resolution sidewall observation and LER measurement of a photoresist pattern by a metrological tilting-AFM

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

Proceedings Volume PC12053, PC1205307 (2022) https://doi.org/10.1117/12.2614122

KEYWORDS: Photoresist materials, Line edge roughness, Metrology, Atomic force microscopy, Scanning electron microscopy, Lithography, Anisotropy, Silicon, 3D metrology, Reliability

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SPIE Journal Paper | 30 May 2022

Unbiased line edge roughness measurement using profile-averaging method for precise roughness parameters measurement

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

JM3, Vol. 21, Issue 02, 024001, (May 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.024001

KEYWORDS: Scanning electron microscopy, Line edge roughness, Metrology, Atomic force microscopy, Spatial resolution, Error analysis, Denoising, Silicon, Edge roughness, 3D metrology

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Proceedings Article | 22 February 2021 Presentation + Paper

Evaluating SEM-based LER metrology using a metrological tilting-AFM

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

Proceedings Volume 11611, 1161117 (2021) https://doi.org/10.1117/12.2583475

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SPIE Journal Paper | 23 October 2020 Open Access

Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

JM3, Vol. 19, Issue 04, 044001, (October 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.4.044001

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SPIE Journal Paper | 23 March 2020 Open Access

Line edge roughness measurement on vertical sidewall for reference metrology using a metrological tilting atomic force microscope

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

JM3, Vol. 19, Issue 01, 014003, (March 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.1.014003

KEYWORDS: Line edge roughness, Metrology, Atomic force microscopy, Clouds, Scanning electron microscopy, Atomic force microscope, Servomechanisms, 3D metrology, Transmission electron microscopy, Semiconductors

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Proceedings Article | 20 March 2020 Presentation + Paper

Comparison of SEM and AFM performances for LER reference metrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

Proceedings Volume 11325, 113250Q (2020) https://doi.org/10.1117/12.2551468

KEYWORDS: Scanning electron microscopy, Line edge roughness, 3D metrology, Metrology, Spatial resolution, Edge roughness, Atomic force microscopy, 3D image processing, Error analysis, Lithography

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Proceedings Article | 26 March 2019 Paper

Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

Proceedings Volume 10959, 109592B (2019) https://doi.org/10.1117/12.2511712

KEYWORDS: Line edge roughness, Metrology, Atomic force microscopy, Scanning electron microscopy, 3D metrology, Surface roughness, Semiconductors, Lithography, Critical dimension metrology, Dimensional metrology

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Proceedings Article | 7 June 2013 Paper

A new heterodyne tandem-interferometer for fully interferometric three-dimensional imaging spectrometry

Tetsuya Hashimoto, Akiko Hirai, Kyu Yoshimori

Proceedings Volume 8883, 88830T (2013) https://doi.org/10.1117/12.2022104

KEYWORDS: Interferometers, Heterodyning, Interferometry, 3D image processing, Bragg cells, Spectroscopy, Image retrieval, Holograms, Imaging spectrometry, Signal processing

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Proceedings Article | 19 September 2007 Paper

Adaptive nulling in the mid-IR for the Terrestrial Planet Finder interferometer

Robert Peters, Oliver Lay, Akiko Hirai, Muthu Jeganathan

Proceedings Volume 6693, 669315 (2007) https://doi.org/10.1117/12.734775

KEYWORDS: Nulling interferometry, Mid-IR, Interferometers, Polarization, Spectroscopy, Planets, Mirrors, Gas lasers, Deformable mirrors, Phase measurement

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Proceedings Article | 28 June 2006 Paper

Adaptive nulling for the Terrestrial Planet Finder Interferometer

Robert Peters, Oliver Lay, Akiko Hirai, Muthu Jeganathan

Proceedings Volume 6268, 62681C (2006) https://doi.org/10.1117/12.672170

KEYWORDS: Nulling interferometry, Polarization, Mid-IR, Spectroscopy, Planets, Phase measurement, Mirrors, Interferometers, Sensors, Deformable mirrors

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Proceedings Article | 14 September 2005 Paper

Adaptive nulling with a deformable mirror in the near-IR

Robert Peters, Akiko Hirai, Muthu Jeganathan, Oliver Lay

Proceedings Volume 5905, 590507 (2005) https://doi.org/10.1117/12.615463

KEYWORDS: Nulling interferometry, Polarization, Mid-IR, Prisms, Actuators, Deformable mirrors, Phase measurement, Mirrors, Spectroscopy, Planets

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Proceedings Article | 20 October 2004 Paper

Near-IR demonstration of adaptive nuller based on deformable mirror

Robert Peters, Akiko Hirai, Muthu Jeganathan, Oliver Lay

Proceedings Volume 5491, (2004) https://doi.org/10.1117/12.550672

KEYWORDS: Mid-IR, Polarization, Mirrors, Nulling interferometry, Spectroscopy, Prisms, Deformable mirrors, Interferometers, Planets, Sensors

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Proceedings Article | 20 November 2003 Paper

Low-coherence tandem interferometer for remote calibration of gauge blocks

Akiko Hirai, Hirokazu Matsumoto

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.505410

KEYWORDS: Interferometers, Calibration, Optical fibers, Standards development, Single mode fibers, Metrology, Mirrors, Light sources, Photodetectors, Interferometry

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Proceedings Article | 19 November 2003 Paper

3-D surface profile measurement by 2-D heterodyne low-coherence interferometer

Hirokazu Matsumoto, Akiko Hirai

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.530945

KEYWORDS: Heterodyning, Interferometers, Bragg cells, Sensors, 3D metrology, Mirrors, Light sources, Spherical lenses, Mode locking, Femtosecond phenomena

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Proceedings Article | 19 November 2003 Paper

New remote length measurements with optical fiber using a low-coherence tandem interferometer

Akiko Hirai, Hirokazu Matsumoto

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.530029

KEYWORDS: Interferometers, Optical fibers, Single mode fibers, Optical testing, Light sources, Signal detection, Metrology, Light, Interferometry, Beam splitters

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Proceedings Article | 19 November 2003 Paper

Novel heterodyne Fourier transform spectrometer for the NIR region

Akiko Hirai, Dejiao Lin, Chie Tagaki, Hirokazu Matsumoto

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.530938

KEYWORDS: Spectroscopy, Fourier transforms, Heterodyning, Diffraction gratings, Mirrors, Modulation, Near infrared, Diffraction, Fourier spectroscopy, Spherical lenses

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SPIE Journal Paper | 1 November 2001

Transmission of optical length information through single-mode fiber by low-coherence tandem interferometer

Hirokazu Matsumoto, Akiko Hirai

OE, Vol. 40, Issue 11, (November 2001) https://doi.org/10.1117/12.10.1117/1.1409395

KEYWORDS: Interferometers, Single mode fibers, Optical fibers, Light sources, Calibration, Ferroelectric materials, Interferometry, Collimation, Michelson interferometers, Diodes

Proceedings Article | 22 October 2001 Paper

Gauge block interferometer using three frequency-stabilized lasers

Youichi Bitou, Akiko Hirai, Hideaki Yoshimori, Feng-Lei Hong, Yun Zhang, Atsushi Onae, Katuo Seta

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445633

KEYWORDS: Interferometers, Semiconductor lasers, Helium neon lasers, Nd:YAG lasers, Laser stabilization, Fringe analysis, Laser development, Light sources, Modulation, Mirrors

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Proceedings Article | 8 May 2001 Paper

Low-coherence tandem interferometer for in-situ measurement of the refractive index

Akiko Hirai, Hirokazu Matsumoto

Proceedings Volume 4416, (2001) https://doi.org/10.1117/12.427034

KEYWORDS: Interferometers, Refractive index, Interferometry, Glasses, Michelson interferometers, Light sources, Sensors, Mirrors, Quartz, Distortion

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SPIE Journal Paper | 1 March 2001

High-sensitivity surface-profile measurements by heterodyne white-light interferometer

Akiko Hirai, Hirokazu Matsumoto

OE, Vol. 40, Issue 03, (March 2001) https://doi.org/10.1117/12.10.1117/1.1349216

KEYWORDS: Interferometers, Mirrors, Heterodyning, Bragg cells, Signal detection, Spherical lenses, Michelson interferometers, Light sources, 3D metrology, Laser beam diagnostics

Proceedings Article | 15 December 2000 Paper

Heterodyne white-light interferometer using optical grating

Akiko Hirai, Hirokazu Matsumoto

Proceedings Volume 4087, (2000) https://doi.org/10.1117/12.406354

KEYWORDS: Interferometers, Heterodyning, Mirrors, Homodyne detection, Diffraction gratings, Signal to noise ratio, Spherical lenses, Signal detection, Bragg cells, Diffraction

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Proceedings Article | 7 May 1999 Paper

High-sensitivity surface measurements by a heterodyne white-light interferometer

Akiko Hirai, Hirokazu Matsumoto

Proceedings Volume 3740, (1999) https://doi.org/10.1117/12.347802

KEYWORDS: Interferometers, Bragg cells, Heterodyning, Mirrors, Signal detection, Spherical lenses, Light sources, Michelson interferometers, Interferometry, Sensors

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Proceedings Article | 1 September 1996 Paper

Multichannel spectral imaging system consisting of dichroic mirrors

Akiko Hirai

Proceedings Volume 2778, 2778FE (1996) https://doi.org/10.1117/12.2316243

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Showing 5 of 26 publications

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