Prof. Albert Lin Profile

Prof. Albert Lin

Professor at National Yang Ming ChiaoTung Univ

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Publications (3)

Proceedings Article | 28 September 2023 Presentation

Investigation on attention-based convolutional architectures applied to optical proximity corrections

Albert Lin, Han-Chun Tung, Yen-Wei Feng, Peichen Yu

Proceedings Volume PC12655, PC126550M (2023) https://doi.org/10.1117/12.2676658

KEYWORDS: Optical proximity correction, Network architectures, Machine learning, Convolution, 3D modeling, Scanners, Reflection, Physics, Photoresist processing, Optical lithography

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Proceedings Article | 8 November 2022 Presentation

Human machine competition in intelligent laser manufacturing in semiconductor processes

Chung-Yuan Chang, Cheng Ching Hsu, Tejender Rawat, Shih-Wei Chen, Albert Lin

Proceedings Volume 12221, 1222104 (2022) https://doi.org/10.1117/12.2632661

KEYWORDS: Semiconductor manufacturing, Semiconductors, Semiconductor lasers, Annealing, Laser manufacturing, Silicon, Process modeling, Physics, Optimization (mathematics), Thin films

Proceedings Article | 3 October 2022 Presentation

Process-aware circuit simulation using machine learning compact models for metal oxide semiconductor capacitors under illumination (Conference Presentation)

Zheng Kai Yang, Ya-Wen Ho, Tejender Rawat, Chung-Yuan Chang, Albert Lin

Proceedings Volume 12227, 122270M (2022) https://doi.org/10.1117/12.2632334

KEYWORDS: Device simulation, Machine learning, Semiconductors, Oxides, Metals, Capacitors, Process modeling, Plasma treatment, Linear filtering, Instrument modeling

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