Dr. Alexander Philippou Profile

Dr. Alexander Philippou

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Publications (2)

Proceedings Article | 23 March 2012 Paper

Calibration and verification of a stochastic model for EUV resist

Weimin Gao, Alexander Philippou, Ulrich Klostermann, Joachim Siebert, Vicky Philipsen, Eric Hendrickx, Tom Vandeweyer, Gian Lorusso

Proceedings Volume 8322, 83221D (2012) https://doi.org/10.1117/12.917804

KEYWORDS: Line width roughness, Calibration, Data modeling, Stochastic processes, Extreme ultraviolet, Semiconducting wafers, Photomasks, Cadmium, Scanning electron microscopy, Photons

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Proceedings Article | 20 May 2011 Paper

Role of ellipsometry in DPT process characterization and impact of performance for contact holes

Itaru Kamohara, Vitaliy Domnenko, Alexander Philippou

Proceedings Volume 8081, 80810R (2011) https://doi.org/10.1117/12.899901

KEYWORDS: Ellipsometry, Lithography, Semiconducting wafers, Signal processing, Signal detection, Diffraction, Etching, Photoresist processing, Nanoimprint lithography, Wafer-level optics

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