Dr. Amil Patel Profile

Dr. Amil Patel

Senior Scientist

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Publications (4)

Proceedings Article | 15 November 2005 Open Access

Enabling nanoscale science and engineering via highly flexible low-cost maskless lithography

Henry Smith, Rajesh Menon, Amil Patel, David Chao, Michael Walsh, G. Barbastathish

Proceedings Volume 6002, 60020B (2005) https://doi.org/10.1117/12.632117

KEYWORDS: Lithography, Electron beam lithography, Zone plates, Maskless lithography, Photons, Nanolithography, Electrons, Silicon, Electronics, Nanoparticles

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Proceedings Article | 6 May 2005 Paper

Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning

Rajesh Menon, Amil Patel, David Chao, Michael Walsh, Henry Smith

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598742

KEYWORDS: Photomasks, Lithography, Maskless lithography, Zone plates, Semiconducting wafers, Optical lithography, Modulators, Modulation, Photomicroscopy, Manufacturing

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Proceedings Article | 22 January 2005 Paper

Maskless optical lithography using MEMS-based spatial light modulators

Rajesh Menon, Amil Patel, Henry Smith

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.593624

KEYWORDS: Zone plates, Lithography, Spatial light modulators, Optical lithography, Semiconducting wafers, Modulators, Photomasks, Modulation, Photomicroscopy, Wafer-level optics

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Proceedings Article | 17 January 2003 Paper

Zone-plate array lithography (ZPAL): a maskless fast-turnaround system for micro-optic device fabrication

Rajesh Menon, Dario Gil, David Carter, Amil Patel, Henry Smith

Proceedings Volume 4984, (2003) https://doi.org/10.1117/12.477856

KEYWORDS: Zone plates, Lithography, Micro optics, Optics manufacturing, Photomicroscopy, Nanolithography, Semiconducting wafers, Prototyping, Multiplexers, Optical lithography

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