Mr. Andrey Mikhaylov Profile

Andrey Mikhaylov

at Karlsruher Institut für Technologie

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Author

Publications (2)

Proceedings Article | 26 April 2019 Paper

M. Zakharova, S. Reich, A. Mikhaylov, V. Vlnieska, Marcus Zuber, Sabine Engelhardt, T. Baumbach, D. Kunka

Proceedings Volume 11032, 110320U (2019) https://doi.org/10.1117/12.2520723

KEYWORDS: Photomasks, Visibility, X-rays, Sensors, Gold, Photoresist materials, X-ray imaging, Phase contrast, Lithography

Proceedings Article | 26 April 2019 Presentation + Paper

Andrey Mikhaylov, Stefan Reich, Anton Plech, Margarita Zakharova, Vitor Vlnieska, Danays Kunka

Proceedings Volume 11032, 1103208 (2019) https://doi.org/10.1117/12.2520687

KEYWORDS: X-rays, X-ray imaging, Sensors, Visibility, Diamond, Absorption, Printing, Refractive index, Manufacturing, Scanning electron microscopy

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