Ms. Ann Koo Profile

Ann Koo

at Frontier Semiconductor Inc

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Author

Publications (8)

Proceedings Article | 10 September 2007 Paper

Measurement of ultra low film stress, local stress distribution and flatness by imaging nanotopography based on low coherence phase shifting interferometry in conjunction with wafer and film thickness metrology

Alexander Pravdivtsev, Manuel Santos, Ann Koo

Proceedings Volume 6672, 66720P (2007) https://doi.org/10.1117/12.732711

KEYWORDS: Interferometers, Metrology, Semiconducting wafers, Thin films, Coherence (optics), Phase interferometry, Fizeau interferometers, Image resolution, Semiconductors, Lithography

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Proceedings Article | 14 August 2006 Paper

Fast and accurate non-contact in situ optical metrology for end-point detection

Wojciech Walecki, Alexander Pravdivstev, Manuel Santos, Ann Koo

Proceedings Volume 6292, 629211 (2006) https://doi.org/10.1117/12.675342

KEYWORDS: Semiconducting wafers, Mirrors, Scanners, Interferometers, Fiber optics, Coherence (optics), Wafer-level optics, Etching, Optical fibers, Silicon

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Proceedings Article | 14 August 2006 Paper

High-speed high-accuracy fiber optic low-coherence interferometry for in situ grinding and etching process monitoring

Wojciech Walecki, Alexander Pravdivtsev, Manuel Santos, Ann Koo

Proceedings Volume 6293, 62930D (2006) https://doi.org/10.1117/12.675592

KEYWORDS: Mirrors, Semiconducting wafers, Scanners, Fiber optics, Interferometers, Visible radiation, Infrared radiation, Sensors, Optical fibers, Coherence (optics)

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Proceedings Article | 23 January 2006 Paper

Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio micro-fabricated and micro-machined structures and multilayer membranes

Wojciech Walecki, Talal Azfar, Alexander Pravdivstev, Manuel Santos, Ann Koo

Proceedings Volume 6109, 61090J (2006) https://doi.org/10.1117/12.639267

KEYWORDS: Interferometers, Reflectometry, Semiconducting wafers, Sensors, Silicon, Interferometry, Reflectivity, Fiber optics, Refractive index, Thin films

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Proceedings Article | 6 January 2006 Paper

Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS structures

Wojciech Walecki, Talal Azfar, Alexander Pravdivstev, Manuel Santos, Tim Wong, Aiguo Feng, Ann Koo

Proceedings Volume 6111, 61110M (2006) https://doi.org/10.1117/12.645560

KEYWORDS: Raman spectroscopy, Interferometers, Semiconducting wafers, Reflectometry, Silicon, Interferometry, Microelectromechanical systems, Sensors, Spectroscopy, Infrared radiation

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Proceedings Article | 18 August 2005 Paper

Synchronized low coherence interferometry for in-situ and ex-situ metrology for semiconductor manufacturing

Wojciech Walecki, Alexander Pravdivtsev, Kevin Lai, Manuel Santos, Ann Koo

Proceedings Volume 5880, 58800H (2005) https://doi.org/10.1117/12.615254

KEYWORDS: Semiconducting wafers, Interferometers, Interferometry, Metrology, Michelson interferometers, Semiconductor manufacturing, Silicon, Reflectivity, Coherence (optics), Semiconductors

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Proceedings Article | 22 January 2005 Paper

Low-coherence interferometric absolute distance gauge for study of MEMS structures

Wojciech Walecki, Kevin Lai, Alexander Pravdivtsev, Vitali Souchkov, Phuc Van, Talal Azfar, Tim Wong, S. H. Lau, Ann Koo

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.590013

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Interferometry, Distance measurement, Refractive index, Beam splitters, Optical fibers, Interferometers, Metrology, Sensors

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Proceedings Article | 23 December 2003 Paper

Novel low coherence metrology for nondestructive characterization of high aspect ratio micro-fabricated and micro-machined structures

Wojciech Walecki, Frank Wei, Phuc Van, Kevin Lai, Tim Lee, S. Lau, Ann Koo

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.530749

KEYWORDS: Metrology, Beam splitters, Coherence (optics), Nondestructive evaluation, Semiconducting wafers, Reflection, Interferometry, Sensors, Signal detection, Microelectromechanical systems

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Showing 5 of 8 publications

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