Dr. Anne Vandooren Profile

Dr. Anne Vandooren

at imec

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Publications (3)

Proceedings Article | 28 April 2023 Poster + Paper

Cost analysis of device options and scaling boosters below the A14 technology node

G. Mirabelli, A. Vandooren, C. Roda Neve, V. Gonzalez, H. Mertens, A. Farokhnejad, P. Schuddinck, G. Murdoch, S. Salahuddin, O. Zografos, L. Ragnarsson, P. Weckx, Z. Tokei, G. Hellings, J. Ryckaert

Proceedings Volume 12495, 124951K (2023) https://doi.org/10.1117/12.2656456

KEYWORDS: Semiconducting wafers, Metals, Back end of line, Silver, Optical lithography, Transmission electron microscopy, Nanosheets, Front end of line, Wafer bonding, Semiconductors

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Proceedings Article | 27 April 2023 Presentation + Paper

Detection of bonding voids for 3D integration

Cong Chen, Dieter Van Den Heuvel, Matteo Beggiato, Bensu Tunca Altintas, Alain Moussa, Anne Vandooren, Bart Baudemprez, Michael Schöbitz, Wassim Khaldi, Janusz Bogdanowicz, Christophe Beral, Anne-Laure Charley

Proceedings Volume 12496, 124961B (2023) https://doi.org/10.1117/12.2657950

KEYWORDS: Inspection, Wafer bonding, Silicon, Microscopes, Scanning electron microscopy, Optical microscopes, Infrared microscopy

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Proceedings Article | 4 March 2010 Paper

Shaping the future of nanoelectronics beyond the Si roadmap with new materials and devices

Marc Heyns, Florence Bellenger, Guy Brammertz, Matty Caymax, Mirco Cantoro, Stefan De Gendt, Brice De Jaeger, Annelies Delabie, Geert Eneman, Guido Groeseneken, Geert Hellings, Michel Houssa, Francesca Iacopi, Daniele Leonelli, Dennis Lin, Wim Magnus, Koen Martens, Clement Merckling, Marc Meuris, Jerome Mitard, Julien Penaud, Geoffrey Pourtois, Marc Scarrozza, Eddy Simoen, Bart Soree, Sven Van Elshocht, William Vandenberghe, Anne Vandooren, Philippe Vereecke, Anne Verhulst, Wei-E Wang

Proceedings Volume 7640, 764003 (2010) https://doi.org/10.1117/12.852587

KEYWORDS: Silicon, Germanium, Interfaces, Oxides, Gallium arsenide, Dielectrics, Quantum wells, Field effect transistors, Heterojunctions, Nanowires

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