Dr. Ash M. Parameswaran Profile

Dr. Ash M. Parameswaran

Assoc Prof & Director of IMMR at Simon Fraser Univ

SPIE Involvement:

Author | Instructor

Proceedings Article | 14 February 2012 Paper

Highly accurate measurement of varying drug dosage for real-time analysis of chemomechanical response of cardiomyocytes

Avneet Bajwa, Behraad Bahreyni, Ash Parameswaran

Proceedings Volume 8251, 82510N (2012) https://doi.org/10.1117/12.907105

KEYWORDS: Electrodes, Microfluidics, Diffusion, 3D modeling, Time metrology, Drug development, Ions, Glasses, Gold, Finite element methods

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Proceedings Article | 7 February 2012 Paper

Bosch-like method for creating high aspect ratio poly(methyl methacrylate) (PMMA) structures

Marius Haiducu, Dan Sameoto, Ian Foulds, Robert Johnstone, Ash Parameswaran

Proceedings Volume 8248, 82480G (2012) https://doi.org/10.1117/12.908690

KEYWORDS: Polymethylmethacrylate, Etching, Lamps, Deep ultraviolet, Microfluidics, Light, Aluminum, Microfabrication, Optical lithography, Microelectromechanical systems

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Proceedings Article | 17 February 2011 Paper

Simulating enhanced photo carrier collection in the multifinger photogate active pixel sensors

Phanindra Kalyanam, Glenn Chapman, Ash Parameswaran

Proceedings Volume 7875, 787508 (2011) https://doi.org/10.1117/12.876767

KEYWORDS: Device simulation, Absorption, Standards development, Sensors, Active sensors, Computer simulations, CMOS technology, CMOS sensors, TCAD, Photodiodes

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Proceedings Article | 15 February 2011 Paper

Initial experiments with flexible conductive electrodes for potential applications in cancer tissue screening

Daehan Chung, Sam Seyfollahi, Ajit Khosla, Bonnie Gray, Ash Parameswaran, Ramani Ramaseshan, Kirpal Kohli

Proceedings Volume 7929, 79290Z (2011) https://doi.org/10.1117/12.875563

KEYWORDS: Electrodes, Tissues, Polymers, Nanoparticles, Cancer, Silver, Metals, Skin, Lithography, Polymethylmethacrylate

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Proceedings Article | 18 February 2010 Paper

Patterning of PMMA microfluidic parts using screen printing process

Aminreza Ahari Kaleibar, Mona Rahbar, Marius Haiducu, Ash Parameswaran

Proceedings Volume 7593, 75930E (2010) https://doi.org/10.1117/12.841345

KEYWORDS: Microfluidics, Polymethylmethacrylate, Printing, Optical lithography, Image processing, Computer aided design, Deep ultraviolet, Ultraviolet radiation, Lamps, Etching

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Proceedings Article | 26 January 2010 Paper

Enhanced sensitivity achievement using advanced device simulation of multifinger photo gate active pixel sensors

Phanindra V. R. Kalyanam, Glenn Chapman, Ash Parameswaran

Proceedings Volume 7536, 75360G (2010) https://doi.org/10.1117/12.839157

KEYWORDS: Sensors, Active sensors, Silicon, Device simulation, Computer simulations, Standards development, Transistors, Absorption, Molybdenum, CMOS sensors

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Proceedings Article | 28 January 2009 Paper

The implementation and spectrum response analysis of multifinger photogate APS pixels

Jenny Leung, Michelle La Haye, Glenn Chapman, Jeff Liu, Phanindra Kalyanam, M. Parameswaran

Proceedings Volume 7249, 724903 (2009) https://doi.org/10.1117/12.806110

KEYWORDS: Absorption, Light emitting diodes, Silicon, Sensors, Calibration, Quantum efficiency, Transistors, Molybdenum, Capacitors, CMOS sensors

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SPIE Journal Paper | 1 October 2008

Isopropanol/water as a developer for poly(dimethylglutarimide)

Robert Johnstone, Ian Foulds, M. Pallapa, Ash Parameswaran

JM3, Vol. 7, Issue 04, 043006, (October 2008) https://doi.org/10.1117/12.10.1117/1.2990738

KEYWORDS: Etching, Semiconducting wafers, Deep ultraviolet, Gold, Absorption, Photoresist developing, Photoresist materials, Optical lithography, Polymers, Chromium

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Proceedings Article | 30 January 2006 Paper

MEMS mechanical logic units: characterization and improvements of devices fabricated with MicraGEM and PolyMUMPs

Sae-Won Lee, Robert Johnstone, Ash Parameswaran

Proceedings Volume 6037, 60371A (2006) https://doi.org/10.1117/12.638261

KEYWORDS: Logic, Electrodes, Microelectromechanical systems, Semiconductors, Resistance, Bridges, Relays, Logic devices, Transistors, Mechanical engineering

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SPIE Journal Paper | 1 October 2003

New design for surface micromachined bistable and multistable switches

Ian Foulds, Maria Trinh, Sam Hu, Steven Liao, Robert Johnstone, M. Parameswaran DUPLICATE RECORD - Do Not U

JM3, Vol. 2, Issue 04, (October 2003) https://doi.org/10.1117/12.10.1117/1.1610476

KEYWORDS: Switches, Microelectromechanical systems, Switching, Microfabrication, Relays, Mirrors, Reliability, Scanning electron microscopy, Microsystems, Optical switching

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SPIE Journal Paper | 1 January 2003

Determination of optical alignment in free-space micro-optical-bench systems using paraxial ray-transfer matrices

Robert Johnstone, M. Parameswaran

JM3, Vol. 2, Issue 01, (January 2003) https://doi.org/10.1117/12.10.1117/1.1531192

KEYWORDS: Matrices, Tolerancing, Optical alignment, Geometrical optics, Manufacturing, Optics manufacturing, Optical components, Ray tracing, Mirrors, Systems modeling

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Proceedings Article | 2 October 2001 Paper

Self-assembly of surface-micromachined structures using electrostatic attraction

Robert Johnstone, M. Parameswaran

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443076

KEYWORDS: Mirrors, Semiconducting wafers, Surface micromachining, Microfabrication, Prototyping, Numerical simulations, Glasses, 3D equipment, Micro optics, Sensors

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Proceedings Article | 20 October 2000 Paper

Micromachined muscle cell analysis chip

Weijie Wang, Paul Li, M. Parameswaran

Proceedings Volume 4230, (2000) https://doi.org/10.1117/12.404891

KEYWORDS: Acoustics, Crystals, Quartz, Glasses, Microfluidics, Electrodes, Liquids, Microfabrication, Wave sensors, Biological research

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Proceedings Article | 3 April 2000 Paper

Micro-strain gauge endoscopic tactile sensor using two sensing elements for tissue manipulation

Javad Dargahi, M. Normandeau, J. Milne, M. Parameswaran, Shahram Payandeh

Proceedings Volume 4051, (2000) https://doi.org/10.1117/12.381648

KEYWORDS: Sensors, Endoscopy, Surgery, Tissues, Visualization, Semiconductors, Light emitting diodes, Resistance, Microscopes, Photography

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Proceedings Article | 8 September 1998 Paper

Micromachined gas detector based on self-aligned ionization tips

Bahram Ghodsian, Marek Syrzycki, M. Parameswaran

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323915

KEYWORDS: Sensors, Electrodes, Oxides, Ionization, Semiconducting wafers, Manufacturing, Silicon, Molecules, Micromachining, Oxidation

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Proceedings Article | 23 September 1996 Paper

Simple technology for fabricating micromechanical 3D structures using electroplating without photoresist mold

Bahram Ghodsian, M. Parameswaran, Marek Syrzycki

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251207

KEYWORDS: Silicon, Etching, Semiconducting wafers, Electroplating, Gold, Sensors, Anisotropic etching, Nickel, Plating, Ionization

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Proceedings Article | 18 December 1995 Paper

Design of a micromachined pressure sensor for endoscopic graspers

Manish Mehta, M. Parameswaran, Shahram Payandeh

Proceedings Volume 2593, (1995) https://doi.org/10.1117/12.228637

KEYWORDS: Sensors, Endoscopy, Teeth, Glasses, Surgery, Silicon, Electrodes, Etching, Tissues, Capacitance

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Proceedings Article | 30 June 1995 Paper

Integrated transducer systems

Marek Syrzycki, M. Parameswaran, Glenn Chapman

Proceedings Volume 2634, (1995) https://doi.org/10.1117/12.213135

KEYWORDS: Transducers, Sensors, Signal processing, Silicon, Magnetic sensors, Micromachining, System integration, Semiconducting wafers, Chemical fiber sensors, Optical sensors

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Proceedings Article | 31 August 1993 Paper

Commercial CMOS foundry thermal display for dynamic thermal scene simulation

Michael Gaitan, M. Parameswaran, R. Barry Johnson, Ronald Chung

Proceedings Volume 1969, (1993) https://doi.org/10.1117/12.154731

KEYWORDS: Resistance, Display technology, Temperature metrology, Scene simulation, Imaging systems, Silicon, Micromachining, Manufacturing, Chemical elements, Custom fabrication

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Showing 5 of 19 publications

SPIE Conference Volume | 20 October 2000

Micromachining and Microfabrication

SPIE Conference Volume | 29 September 1999

Education in Microelectronics and MEMS

Conference Committee Involvement (8)

Smart Sensors, Actuators, and MEMS II

9 May 2005 | Sevilla, Spain

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

13 December 2004 | Sydney, Australia

Device and Process Technologies for Microelectronics, MEMS, and Photonics

10 December 2003 | Perth, Australia

Smart Sensors, Actuators, and MEMS

19 May 2003 | Maspalomas, Gran Canaria, Canary Islands, Spain

Micromachining and Microfabrication Process Technology VIII

27 January 2003 | San Jose, CA, United States

Showing 5 of 8 Conference Committees

Course Instructor

SC236: Polysilicon Surface Micromachine Technology and Devices

This course is designed to introduce newcomers to micromachining technology and concepts as well as those with a basic familiarity with integrated circuit manufacturing technology about the emerging field of Micro Electro Mechanical Systems (MEMS). Both manufacturing technologies for these devices and examples of sensor and actuator devices will be presented. The course focuses on polysilicon surface micromachining, but will also include a brief overview of other MEMS manufacturing technologies and devices.

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