Prof. B. Erdem Alaca Profile

Prof. B. Erdem Alaca

at Koc Univ

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 19 March 2018 Paper

Fabrication of optical nanodevices through field-emission scanning probe lithography and cryogenic etching

Cemal Aydogan, Martin Hofmann, Claudia Lenk, Burkhard Volland, Ivo Rangelow, Mahmut Bicer, B. Erdem Alaca, Onur Ates, Hamdi Torun, Arda Yalcinkaya

Proceedings Volume 10584, 105841G (2018) https://doi.org/10.1117/12.2305268

KEYWORDS: Scanning probe lithography, Cryogenics, Etching, Electron beam lithography, Silicon, Lithography, Manufacturing, Split ring resonators, Resonators, Ions

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Proceedings Article | 19 March 2018 Presentation + Paper

Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

Ivo Rangelow, Claudia Lenk , Martin Hofmann , Steve Lenk , Tzvetan Ivanov , Ahmad Ahmad , Marcus Kaestner, Elshad Guliyev, Christoph Reuter, Matthias Budden, Jens-Peter Zöllner, Mathias Holz , Alexander Reum, Zahid Durrani, Mervyn Jones, Cemal Aydogan, Mahmut Bicer, B. Erdem Alaca, Michael Kuehnel, Thomas Fröhlich, Roland Fuessl, E. Manske

Proceedings Volume 10584, 1058406 (2018) https://doi.org/10.1117/12.2299955

KEYWORDS: Silicon, Lithography, Etching, Scanning probe lithography, Cryogenics, Optical alignment, Nanoelectronics, Reactive ion etching, Nanolithography, Electron beam lithography

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Proceedings Article | 14 March 2018 Presentation

Measurement of composition of mixtures at high pressures with high sensitivity using frequency response of microcantilevers (Conference Presentation)

Shadi Khan Baloch, Alper Kiraz, Alexandr Jonáš, B. Erdem Alaca, Can Erkey

Proceedings Volume 10491, 104910T (2018) https://doi.org/10.1117/12.2287850

KEYWORDS: Bioalcohols, Nanostructuring, Temperature metrology, Calibration

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Proceedings Article | 31 January 2018 Paper

Single nano-digit and closed-loop scanning probe lithography for manufacturing of electronic and optical nanodevices

Ivo Rangelow, Claudia Lenk , Martin Hofmann , Tzvetan Ivanov, Steve Lenk, Elshad Guliyev, Marcus Kaestner, Cemal Aydogan, Mahmut Bicer, B. Erdem Alaca, Onur Ates, Hamdi Torun, Arda Yalcinkaya, Ahmad Ahmad, Alexander Reum, Mathias Holz

Proceedings Volume 10456, 1045621 (2018) https://doi.org/10.1117/12.2282606

KEYWORDS: Lithography, Scanning probe lithography, Cryogenics, Etching, Optics manufacturing, Nanostructures, Nanolithography, Optical lithography, Split ring resonators, Image resolution

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