Dr. Bahram Ghodsian Profile

Dr. Bahram Ghodsian

SPIE Involvement:

Author | Instructor

Publications (4)

SPIE Journal Paper | 1 July 2002

Fabrication of micro suspensions on silicon substrate

Bahram Ghodsian

JM3, Vol. 1, Issue 02, (July 2002) https://doi.org/10.1117/12.10.1117/1.1484162

KEYWORDS: Etching, Anisotropic etching, Oxides, Silicon, Fabrication, Semiconducting wafers, CMOS technology, Low pressure chemical vapor deposition, Micromachining, Bulk micromachining

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Proceedings Article | 30 August 1999 Paper

Standard postprocessing technique for fabrication of large microsuspended structures in CMOS

Bahram Ghodsian, Veljko Milanovic, Orlando Villavicencio

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361212

KEYWORDS: Etching, Anisotropic etching, Oxides, Fabrication, Semiconducting wafers, Silicon, Photomasks, CMOS technology, Low pressure chemical vapor deposition, Micromachining

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Proceedings Article | 8 September 1998 Paper

Micromachined gas detector based on self-aligned ionization tips

Bahram Ghodsian, Marek Syrzycki, M. Parameswaran

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323915

KEYWORDS: Sensors, Electrodes, Oxides, Ionization, Semiconducting wafers, Manufacturing, Silicon, Molecules, Micromachining, Oxidation

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Proceedings Article | 23 September 1996 Paper

Simple technology for fabricating micromechanical 3D structures using electroplating without photoresist mold

Bahram Ghodsian, M. Parameswaran, Marek Syrzycki

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251207

KEYWORDS: Silicon, Etching, Semiconducting wafers, Electroplating, Gold, Sensors, Anisotropic etching, Nickel, Plating, Ionization

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Course Instructor

SC236: Polysilicon Surface Micromachine Technology and Devices

This course is designed to introduce newcomers to micromachining technology and concepts as well as those with a basic familiarity with integrated circuit manufacturing technology about the emerging field of Micro Electro Mechanical Systems (MEMS). Both manufacturing technologies for these devices and examples of sensor and actuator devices will be presented. The course focuses on polysilicon surface micromachining, but will also include a brief overview of other MEMS manufacturing technologies and devices.

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