Dr. Byong Chon Park Profile

Dr. Byong Chon Park

Principal Research Scientist at Korea Research Institute of Standards and Science

SPIE Involvement:

Author

Publications (16)

SPIE Journal Paper | 26 August 2016 Open Access

Evaluation of carbon nanotube probes in critical dimension atomic force microscopes

Jinho Choi, Byong Chon Park, Sang Jung Ahn, Dal-Hyun Kim, Joon Lyou, Ronald Dixson, Ndubuisi Orji, Joseph Fu, Theodore Vorburger

JM3, Vol. 15, Issue 03, 034005, (August 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.034005

KEYWORDS: Scanning electron microscopy, Line edge roughness, Carbon nanotubes, Atomic force microscope, Metrology, Atomic force microscopy, Standards development, Silicon, Manufacturing, Ion beams

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 18 April 2013 Paper

Roughness of EUV resists exposed to EUV, ArF and KrF radiation as evaluated using three tools: spectroscopic ellipsometry, AFM and SEM

Byong Chon Park, Yong Jai Cho, Insung Kim, Jeongho Yeo

Proceedings Volume 8681, 86812K (2013) https://doi.org/10.1117/12.2011677

KEYWORDS: Extreme ultraviolet lithography, Semiconducting wafers, Line edge roughness, Extreme ultraviolet, Scanning electron microscopy, Atomic force microscopy, Spectroscopic ellipsometry, Photoresist processing, Calibration, Critical dimension metrology

Read Abstract +

Proceedings Article | 25 March 2008 Paper

Effect of setpoint on CD measurement in CD-AFM: plausibility study

B. C. Park, J. Choi, S. J. Ahn, M-j Shin, D-c Ihm, B-h Lee

Proceedings Volume 6922, 69222H (2008) https://doi.org/10.1117/12.773230

KEYWORDS: Calibration, Metrology, Critical dimension metrology, Liquids, Atomic force microscopy, Feedback loops, Near field scanning optical microscopy, Humidity, Error analysis, Solids

Read Abstract +

Proceedings Article | 5 April 2007 Paper

Application of carbon nanotube probes in a critical dimension atomic force microscope

B. Park, J. Choi, S. Ahn, D-H Kim, J. Lyou, R. Dixson, N. Orji, J. Fu, T. Vorburger

Proceedings Volume 6518, 651819 (2007) https://doi.org/10.1117/12.712326

KEYWORDS: Silicon, Carbon nanotubes, Metrology, Atomic force microscopy, Standards development, Scanning electron microscopy, Line edge roughness, Ion beams, Atomic force microscope, Platinum

Read Abstract +

Proceedings Article | 24 March 2006 Paper

Carbon nanotube probes for three-dimensional critical-dimension metrology

B. Park, S. Ahn, J. Choi, K. Jung, W. Song

Proceedings Volume 6152, 61520R (2006) https://doi.org/10.1117/12.656212

KEYWORDS: Atomic force microscopy, Scanning electron microscopy, Carbon nanotubes, Ion beams, Ions, Metrology, Critical dimension metrology, Carbon, Fabrication, 3D metrology

Read Abstract +

Proceedings Article | 18 August 2005 Paper

Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope

Jong-Ahn Kim, Jae Wan Kim, Byong Chon Park, Tae Bong Eom, Chu-Shik Kang

Proceedings Volume 5879, 58790Z (2005) https://doi.org/10.1117/12.614786

KEYWORDS: Calibration, Metrology, Diffraction, Interferometers, Atomic force microscope, Beam splitters, Scanning electron microscopy, Sensors, Temperature metrology, Diffraction gratings

Read Abstract +

Proceedings Article | 10 May 2005 Paper

Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

B. Park, K. Jung, J. Hong, W. Song, B.-h. O, J. Kim

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599245

KEYWORDS: Atomic force microscopy, Carbon nanotubes, Scanning electron microscopy, Ion beams, Atomic force microscope, Ions, Silicon, Critical dimension metrology, Metrology, Image processing

Read Abstract +

Proceedings Article | 10 February 2005 Paper

Algorithm for stylus instruments to measure aspheric surfaces

Byong Park, Y. Lee, Chang-ock Lee, Kilsu Park

Proceedings Volume 5638, (2005) https://doi.org/10.1117/12.574290

KEYWORDS: Aspheric lenses, Calibration, Algorithm development, Fourier transforms, Error analysis, Analytical research, C++, MATLAB, Manufacturing, Surface finishing

Read Abstract +

Proceedings Article | 2 June 2003 Paper

Atomic force microscopy of steep side-walled feature with carbon nanotube tip

Byong Chon Park, Jae-Hyun Kang, Ki Jung, Won Young Song, Beomhoan O, TaeBong Eom

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.482816

KEYWORDS: Atomic force microscopy, Carbon nanotubes, Silicon, Critical dimension metrology, Silicon carbide, Adsorption, Metrology, Positive feedback, Computer engineering, Carbon

Read Abstract +

Proceedings Article | 16 July 2002 Paper

Atomic force microscopy with carbon nanotube tip for critical dimension measurement

Byong Chon Park, Ki Jung, Won Young Song, Beomhoan O, TaeBong Eom

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473510

KEYWORDS: Atomic force microscopy, Silicon, Carbon, Scanning electron microscopy, Carbon nanotubes, Critical dimension metrology, Contamination, Metrology, Silicon carbide, Ion beams

Read Abstract +

Proceedings Article | 25 October 1999 Paper

Differential intensity detection of surface defect scattering

Byong Chon Park, Yun Woo Lee, Beomhoan O

Proceedings Volume 3784, (1999) https://doi.org/10.1117/12.366720

KEYWORDS: Particles, Scattering, Bidirectional reflectance transmission function, Laser scattering, Air contamination, Light scattering, Polarization, Defect detection, Signal detection, Laser scanners

Read Abstract +

Proceedings Article | 14 June 1999 Paper

Precision improvement in diffraction measurement for the one-dimensional grating period

Beomhoan O, Won Young Song, Byong Chon Park, Yeong-Uk Ko

Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350788

KEYWORDS: Diffraction gratings, Diffraction, Calibration, CCD cameras, Laser development, Metrology, Error analysis, Imaging systems, Collimation, Manufacturing

Read Abstract +

Proceedings Article | 30 October 1998 Paper

Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)

Byong Chon Park, Yun Woo Lee, Beomhoan O

Proceedings Volume 3426, (1998) https://doi.org/10.1117/12.328472

KEYWORDS: Bidirectional reflectance transmission function, Receivers, Scattering, Diffraction, Light sources, Argon ion lasers, Laser scattering, Sensors, Light scattering, Collimation

Read Abstract +

Proceedings Article | 8 June 1998 Paper

Precision improvement for the calibration of submicron dimension reference for electron-beam metrology system

Beomhoan O, Byong Chon Park, Yeong-Uk Ko

Proceedings Volume 3332, (1998) https://doi.org/10.1117/12.308767

KEYWORDS: Diffraction gratings, Calibration, Diffraction, Metrology, Semiconductors, Laser development, Manufacturing, Computing systems, Standards development, Electron beams

Read Abstract +

Proceedings Article | 26 September 1997 Paper

Scattering from sinusoidal gratings

Byong Chon Park, Theodore Vorburger, Thomas Germer, Egon Marx

Proceedings Volume 3141, (1997) https://doi.org/10.1117/12.287806

KEYWORDS: Scattering, Light scattering, Diffraction, Laser scattering, Diffraction gratings, Rayleigh scattering, Bidirectional reflectance transmission function, Holography, Scatter measurement, Polarization

Read Abstract +

Proceedings Article | 1 December 1991 Paper

Simple technique for 3-D displacements measurement using synthesis of holographic interferometry and speckle photography

Young Kwon, Seung Park, Byong Chon Park

Proceedings Volume 1554, (1991) https://doi.org/10.1117/12.49507

KEYWORDS: Holography, Fringe analysis, Photography, Speckle, Holographic interferometry, Holograms, 3D metrology, Diffraction, Birefringence, Solids

Read Abstract +

Showing 5 of 16 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years