Dr. Charles Kin P. Cheung Profile

Dr. Charles Kin P. Cheung

at National Institute of Standards and Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 19 January 2005 Paper

Yun Wang, Kin Cheung, Kuang Sheng, Chien-Shing Pai

Proceedings Volume 5592, (2005) https://doi.org/10.1117/12.571959

KEYWORDS: Sensors, Metals, Silicon, Microelectromechanical systems, Electrodes, Thin films, Aluminum, Actuators, Semiconducting wafers, Oxides

Conference Committee Involvement (2)

Nanofabrication: Technologies, Devices, and Applications II

23 October 2005 | Boston, MA, United States

Nanofabrication: Technologies, Devices, and Applications

25 October 2004 | Philadelphia, Pennsylvania, United States

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases