InGaN lasers in the blue and green wavelength range have opened a wide variety of applications in the past years, which all require unique properties of the employed laser chips. In this paper we will show design and process developments for various InGaN laser designs, each optimized for its specific application. For applications which are very sensitive to energy consumption, like mobile AR/VR devices, we investigated InGaN laser chips with resonator lengths as short as 50 μm. To achieve this, we developed an etched facets technology to overcome the challenges of scribing and breaking for facet generation for such short resonator lengths. The etched facets of these devices are coated on-wafer with a dielectric mirror to achieve the desired reflectivity. Depending on the reflectivity chosen, these devices show ultra-low threshold currents below 3mA and output powers above 50 mW. Combined with a flip-chip design with both contacts on one side, such chips can be integrated into silicon wafer-based beam combiners to generate RBG PIC chips for VR/AR laser projection. For high power applications, we will present data of laser bars. Bars emitting at 430 nm achieved 100 W of continuouswave output power per bar and conversion efficiencies of 50%. Together with bars emitting at 450 nm, that were shown in previous publications, wavelength-multiplexing for materials-processing systems can be realized yielding blue laser light sources with multiple kilowatts of output powers.
Blue high-power semiconductor lasers have increased greatly in performance over the recent decade enabling new application fields from high brightness projection up to materials processing beyond 1000W output power systems. Base for best system performance is optimal chip design and reliability of the semiconductor device. In this paper chip design optimization of blue high-power semiconductor laser bars will be shown: In contrast to IR laser bars with high lateral emitter fill factors beyond 50%, optimum design with maximum output power and efficiency for GaN laser bars is currently at very low fill factors in the range of 10%. Laser bar designs ranging from 5% fill factor up to 12.5% fill factor were fabricated and investigated. Additionally, two different emitter pitches with 200μm and 400μm were compared. The design with an emitter width of 30μm and a pitch of 400μm resulted in overall best performance. Additionally, lifetime investigations of single emitters in TO-packages will be discussed. The laser diodes were tested up to 5000h duration at different conditions in operating temperatures ranging from 64°C to 96°C and output power up to 3.5W. Dominating degradation mechanism is wear-out which is accelerated by optical output power and additional thermal activation. Extrapolation of the test results in combination with an acceleration model points towards a median lifetime of up to 65.000h for 25°C operation.
More and more applications are using GaN laser diodes. Visible blue laser devices are well established light sources for converter based business projection of several thousand Lumens. Additional laser-based concepts like near-to-eye projection push device requirements above heretofore limits. In 2017, threshold currents of 10 and 20mA were reported for single mode blue and green laser, respectively. We will present a drastic reduction of laser threshold of green R&D laser samples by more than a factor of 2 down to 10mA. We also will discuss turn-on delay as a limiting factor for modulation speed and spatial resolution of flying spot projection.
On the other side, new applications may occur in the near future. We will present research data on blue laser bars as a possible component for industrial applications like for materials processing. LIV characteristics are measured up to power levels of 107W. We observe power conversion efficiencies of 44% at 60W output power for our best samples.
Industrial material processing like cutting or welding of metals is rather energy efficient using direct diode or diode pumped solid state lasers. However, many applications cannot be addressed by established infrared laser technology due to fundamental material properties of the workpiece: For example materials like copper or gold have too low absorption in the near infrared wavelength range to be processed efficiently by use of existing high power laser systems. The huge interest to enable high power kW systems with more suitable wavelengths in the blue spectral range triggered the German funded research project 'BLAULAS': Therein the feasibility and capability of CW operating high power laser bars based on the GaN material system was investigated by Osram and Laserline.
High performance bars were enabled by defeating fundamental challenges like material quality as well as the chip processes, both of which differ significantly from well-known IR laser bars. The research samples were assembled on actively cooled heat sinks with hard solder technology. For the first time an output power of 98W per bar at 60A drive current was achieved. Conversion efficiency as high as 46% at 50W output power was demonstrated.
The range of applications of blue and green lasers is increasing from year to year. Driving factors are costs and performance. On one hand we study the characteristics of low power R&D c-plane laser structures with improved Gaussian vertical and horizontal beam profile: We present new best values for efficiencies of single mode green lasers of 10.8% at 517nm and new long wavelength data at 532nm with efficiency of 6.5%. Furthermore, we present a new R&D design of a blue single mode laser diode with a very low threshold of 8.5mA. On the other hand, recent R&D results on broad area multi-mode power designs are shown: Efficiencies of 43% at 4W optical output power are achieved. Lifetime tests as long as 10000h are presented. High reliability is reached by a new facet design.
Andreas Loeffler, Christoph Eichler, Jens Mueller, Sven Gerhard, Bernhard Stojetz, Soenke Tautz, Clemens Vierheilig, Jelena Ristic, Adrian Avramescu, Markus Horn, Thomas Hager, Christoph Walter, Thomas Dobbertin, Harald Koenig, Uwe Strauss
In this paper we report recent developments on high power blue laser chips. Reduction of internal losses as well as optimized thermal management had been essential to increase optical output power. R and D samples with average performance of 3W optical output at junction temperatures of 130°C are demonstrated. The chips are suitable for use in a novel multi chip housing: For the first time up to 20 blue laser chips have been packaged into one compact housing resulting in the first InGaN laser device with optical output > 50W. The highly integrated package offers a unique small size. The outer dimensions of the package are 25.5mm x 35mm with an emitting surface of 16mm x 16.5mm. Therefore the complexity of optical alignment is dramatically reduced and only a single sheet multi lens array is required for beam collimation. Besides the unique technical performance the multi-die package offers significantly lower assembly costs because of the reduced complexity and assembly time. The butterfly package contains 4 bars with up to 5 multimode laser chips in series connection on each bar operating at 2.3A. The typical module wavelength is 450nm +/- 10nm. At a case temperature of 50°C the R and D samples achieve efficiencies of typ. 30% and an optical output power of 50W corresponding to an electrical power consumption of ~165W. This new technology can be used for high performance light engines of high brightness projectors.
Uwe Strauβ, Thomas Hager, Georg Brüderl, Teresa Wurm, André Somers, Christoph Eichler, Clemens Vierheilig, Andreas Löffler, Jelena Ristic, Adrian Avramescu
Blue and green InGaN-based R&D laser structures on c-plane GaN substrates are investigated. We analyzed carrier injection efficiencies as well as internal quantum efficiencies up to laser threshold. The injection efficiency of the blue laser structure is measured to be 78%. The internal quantum efficiency of spontaneous emission reaches 50% at 30A/cm2 and 32% at laser threshold. For the green laser structure we found an injection efficiency of 71%, a maximum of internal efficiency of 36% and, at laser threshold. a value of 28%. Both, recombination on defects as well as Auger effect are identified as relevant loss processes up to the laser threshold. An improved 515nm R&D single mode laser in TO56 can is presented. The optical output power of the green single mode laser reaches 250mW in continuous wave operation underneath thermal roll-over. Wall plug efficiency is as high as 9%. In the next step we investigate high power multimode lasers. The new power green R&D laser reaches maximum power of 1.25W at thermal roll-over. The currentoutput characteristic is nearly linear up to 0.9A and 0.6W. At higher currents thermal bending is observed. We measured a maximum wall plug efficiency of the green multimode laser of 13%. The power blue R&D laser in TO90 metal can reaches 5.5W prior to roll-over having the wall plug efficiency of 32% at 3.5W.
Thomas Hager, Uwe Strauß, Christoph Eichler, Clemens Vierheilig, Sönke Tautz, Georg Brüderl, Bernhard Stojetz, Teresa Wurm, Adrian Avramescu, André Somers, Jelena Ristic, Sven Gerhard, Alfred Lell, Stefan Morgott, Oliver Mehl
InGaN based green laser diodes with output powers up to 50mW are now well established for variety of applications ranging from leveling to special lighting effects and mobile projection of 12lm brightness. In future the highest market potential for visible single mode profile lasers might be laser projection of 20lm. Therefore direct green single-mode laser diodes with higher power are required. We found that self heating was the limiting factor for higher current operation. We present power-current characteristics of improved R and D samples with up to 200mW in cw-operation. An optical output power of 100mW is reached at 215mA, a current level which is suitable for long term operation. Blue InGaN laser diodes are also the ideal source for phosphor based generation of green light sources of high luminance. We present a light engine based on LARP (Laser Activated Remote Phosphor) which can be used in business projectors of several thousand lumens on screen. We discuss the advantages of a laser based systems in comparison with LED light engines. LARP requires highly efficient blue power laser diodes with output power above 1W. Future market penetration of LARP will require lower costs. Therefore we studied new designs for higher powers levels. R and D chips with power-current characteristics up to 4W in continuous wave operation on C-mount at 25°C are presented.
Clemens Vierheilig, Christoph Eichler, Sönke Tautz, Alfred Lell, Jens Müller, Fabian Kopp, Bernhard Stojetz, Thomas Hager, Georg Brüderl, Adrian Avramescu, Teresa Lermer, Jelena Ristic, Uwe Strauss
There is a big need on R&D concerning visible lasers for projection applications. The pico-size mobile projection
on the one hand awaits the direct green lasers with sufficiently long lifetimes at optical powers above 50mW. In
this paper we demonstrate R&D-samples emitting at 519nm with lifetimes up to 10.000 hours.
The business projection on the other hand requires high power operation and already uses blue lasers and
phosphor conversion, but there is a strong demand for higher power levels. We investigate the power limits of
R&D laser structures. In continuous wave operation, the power is limited by thermal roll-over. With an excellent
power conversion efficiency of up to 29% the thermal roll-over is as high as 2.5W for a single emitter in TO56
can. We do not observe significant leakage at high currents. Driven in short pulse operation to prevent the laser
from self heating, linear laser characteristics of optical power versus electrical current are observed up to almost
8W of optical power.
Stephan Lutgen, Dimitri Dini, Ines Pietzonka, Soenke Tautz, Andreas Breidenassel, Alfred Lell, Adrian Avramescu, Christoph Eichler, Teresa Lermer, Jens Müller, Georg Bruederl, Alvaro Gomez-Iglesias, Uwe Strauss, Wolfgang Scheibenzuber, Ulrich Schwarz, Bernhard Pasenow, Stephan Koch
Mobile laser projection is of great commercial interest. Today, a key parameter in embedded mobile applications is the
optical output power and the wall plug efficiency of blue and green lasers. We report on improvements of the
performance of true blue riedge waveguide InGaN lasers at 452nm with cw-output power up to 800mW in overstress
and mono mode operation up to 500mW in a temperatures range of 20°C to 80°C. We succeeded in high and almost temperature
independent wall plug efficiencies >20% at stable output power levels from 200 to 500mW in cw-operation.
Due to several improvements of our blue laser diodes we now estimate life times is in the order of 40khrs for 80mW output
power in cw-operation at 40°C. Additional overstress degradation tests at power levels up to 200mW show a strong
dependency of lifetime with output power. Furthermore, we present pioneering results on true green InGaN laser diodes
on c-plane GaN-substrates. The technological challenge is to achieve In-rich InGaN-quantum wells with sufficiently
high material quality for lasing. We investigated the competing recombination processes below laser threshold like nonradiative
defect recombination by electro-optical measurements, such confirming that low defect densities are essential
for stimulated emission. A model for alloy fluctuations in In-rich InGaN-MQWs based on spectral and time resolved
photoluminescence measurements yields potential fluctuations in the order of E0=57meV for our blue laser diodes. To
get a closer insight into the physics of direct green InGaN-Laser we investigated the inhomogeneous broadening of experimentally
measured gain curves via Hakki-Paoli-measurements in comparison to calculated gain spectra based on
microscopic theory showing the importance of strong LO-phonon coupling in this material system. Investigations of current
dependent gain measurements and calculations yield a factor of 2 higher inhomogeneous broadening for our green
lasers than for our blue laser diodes on c-plane GaN. Based on the improvements of the material quality and design we
demonstrate true green InGaN-Laser in cw-operation at 522nm with more than 80mW output power on c-plane GaN.
The combination of low laser threshold ~60-80mA, high slope efficiency ~0.65W/A and low operating voltage 6.9-6.4V
of our green monomode RWG-Laser results in a high wall plug efficiency of 5-6% in a temperature range of 20-60°C.
Red, green and blue semiconductor lasers are of great interest for full color laser projection. Mobile applications require
low power consumption and very small laser devices. InGaN lasers are the best choice for the blue color in applications
with output power requirements below 100mW: (1) they have much higher wall plug efficiencies than conventional blue
frequency doubled diode pumped solid state lasers and (2) they are more compact than semiconductor IR lasers with
subsequent second harmonic generation.
We present blue InGaN lasers with high efficiency at a power consumption of several 100mW. Excellent epitaxial
quality permits low internal losses. Threshold current densities and slope efficiencies are further optimized by improving
the facet coating. The laser threshold current is as low as 25mA and the slope efficiency reaches 1W/A. We present a
wall plug efficiency of 15% at output power levels of 60mW.
In this work, we investigate the absorption distribution in InGaN-on-sapphire based light-emitting diodes (LEDs). We observed by photothermal deflection spectroscopy (PDS) and transmission measurements that most of the absorption takes place in a thin layer close to the sapphire substrate. The lateral intensity distribution in the surrounding of LED emitters is determined by the photocurrent measurement method. Based on the observations by PDS and transmission, a model for the lateral light propagation in the LED-wafer containing also a thin, strong absorbing layer is presented. It is shown that interference of the mode profiles with the absorbing layer leads to different modal absorption which explains the non-exponential intensity distribution. We are able to estimate the optical thickness of the absorbing layer to be 75 nm. Furthermore, this layer can be identified as one of the major loss mechanism in InGaN-LEDs grown on sapphire substrate due to the large absorption coefficient which is effective at the emission wavelength.
The absorption of lateral guided modes in light emitting diodes is determined by the photocurrent measurement method. A theory for waveguide dispersion is presented and extended by ray-tracing simulations. Absorption coefficients of InGaN-on-sapphire and AlGaInP-based structures is evaluated by comparison with simulation curves. For nitride-based samples with emission wavelengths of 415 nm and 441 nm an absorption of 7 cm-1 is obtained. It is found that scattering is present in the buffer layer and influences the lateral intensity distribution. The investigated AlGaInP-based sample exhibits an absorption of α = 30 cm-1 at 650 nm emission wavelength.
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