Dr. Christopher L. Muhlstein
at The Pennsylvania State Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 6 January 2006 Paper
Proceedings Volume 6111, 611106 (2006) https://doi.org/10.1117/12.646468
KEYWORDS: Silicon films, Oxides, Silicon, Microelectromechanical systems, Resonators, Scanning electron microscopy, Photomicroscopy, Humidity, Silica, Oxidation

Proceedings Article | 22 January 2005 Paper
Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.591219
KEYWORDS: Silicon films, Humidity, Silicon, Reliability, Microelectromechanical systems, Oxides, Protactinium, Beam shaping, Photomicroscopy, Oxidation

Proceedings Article | 23 December 2003 Paper
Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.527465
KEYWORDS: Silicon, Silicon films, Oxides, Interfaces, Thin films, Crystals, Failure analysis, Microelectromechanical systems, Mechanics, Oxidation

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