Prof. Chunchi Chen Profile

Prof. Chunchi Chen

at Taiwan Semiconductor Research Institute

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Publications (1)

Proceedings Article | 1 August 2021 Poster

Distributed optical proximity correction with deep-learning lithographic model for i-line photolithography

Wei-Ping Liao, Yu-Fan Lin, Hsueh-Li Liu, Shu-De Gong, Peichen Yu, You-Chia Chang, Jia-Min Shieh, Chun-Chi Chen, Wen-Hsien Huang

Proceedings Volume 11804, 1180421 (2021) https://doi.org/10.1117/12.2593408

KEYWORDS: Optical lithography, Optical proximity correction, Lithography, Resolution enhancement technologies, Photomasks, Parallel computing, Critical dimension metrology, Algorithm development, Transistors, Semiconductors

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