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Dr. Chupeng Zhang
at Xi'an Jiaotong Univ
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Publications (4)
SPIE Journal Paper | 1 December 2021
Flatness on-machine measurement system of chemical mechanical polishing process for large-caliber tin plates
Chupeng Zhang, Zhenghao Deng, Shijie Zhao, Linxiao Yang, Xiuhong Li
OE, Vol. 60, Issue 12, 124103, (December 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.12.124103
KEYWORDS: Tin, Chemical mechanical planarization, Error analysis, Sensors, Diamond, Surface finishing, Kinematics, Chemical reactions, Polishing, Optical engineering
SPIE Journal Paper | 9 January 2018
Design of an ultraprecision computerized numerical control chemical mechanical polishing machine and its implementation
Chupeng Zhang, Huiying Zhao, Xueliang Zhu, Shijie Zhao, Chunye Jiang
OE, Vol. 57, Issue 01, 015104, (January 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.1.015104
KEYWORDS: Polishing, Chemical mechanical planarization, Tin, Error analysis, Surface finishing, Sensors, Kinematics, Particles, Diamond, Control systems design
Proceedings Article | 16 October 2017 Paper
Design of an ultra-precision CNC chemical mechanical polishing machine and its implementation
Chupeng Zhang, Huiying Zhao, Yawen Gu, Xinxing Ban, Chunye Jiang
Proceedings Volume 10448, 104482Q (2017) https://doi.org/10.1117/12.2280953
KEYWORDS: Chemical mechanical planarization
Proceedings Article | 28 February 2017 Paper
Mechanism and experimental research on ultra-precision grinding of ferrite
Xinxing Ban, Huiying Zhao, Longchao Dong, Xueliang Zhu, Chupeng Zhang, Yawen Gu
Proceedings Volume 10256, 1025624 (2017) https://doi.org/10.1117/12.2257340
KEYWORDS: Surface roughness, Analytical research, Spindles, Radium
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