Mr. Daiki Kamiya Profile

Daiki Kamiya

Research Associate at Institute of Science Tokyo

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Publications (5)

Proceedings Article | 16 August 2004 Paper

Mathematical modeling and design of a novel 2-DOF micro attraction actuator for a micro optical switch

Daiki Kamiya, Saeed Bagheri, Mikio Horie

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545993

KEYWORDS: Mirrors, Mathematical modeling, Optical switching, Electrodes, Switches, Neodymium, Actuators, Switching, Microactuators, Capacitors

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Proceedings Article | 18 October 2002 Paper

Design and manufacturing of actuating beams with mirror and electrodes with mirror support pyramid on substrate for optical switch

Mikio Horie, Taketo Gozu, Daiki Kamiya

Proceedings Volume 4902, (2002) https://doi.org/10.1117/12.467717

KEYWORDS: Mirrors, Electrodes, Actuators, Silicon, Manufacturing, Optical switching, Optics manufacturing, Etching, Beam shaping, Reactive ion etching

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Proceedings Article | 10 April 2000 Paper

Development of miniature pantograph mechanisms with large deflective hinges for new surface mount systems

Mikio Horie, Toru Uchida, Daiki Kamiya

Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382324

KEYWORDS: Polymers, Actuators, Sensors, Chlorine, Systems modeling, Instrument modeling, Oscilloscopes, Packaging, Space operations, Metals

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Proceedings Article | 8 October 1999 Paper

Hydrophilic and hydrophobic phenomena on silicon substrate for MEMS

Daiki Kamiya, Mikio Horie

Proceedings Volume 3893, (1999) https://doi.org/10.1117/12.368454

KEYWORDS: Silicon, Sodium, Microelectromechanical systems, Electrodes, Actuators, Ions, Liquids, Glasses, Potassium, Crystals

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Proceedings Article | 5 September 1997 Paper

Characteristic analysis of basic mechanisms with large deflective elastic hinges for three-dimensional micromechanisms

Mikio Horie, Daiki Kamiya, Kozo Ikegami

Proceedings Volume 3224, (1997) https://doi.org/10.1117/12.284532

KEYWORDS: Manufacturing, 3D modeling, Semiconductor manufacturing, Semiconductors

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