Mr. Dan Holladay Profile

Dan Holladay

Retired at BRIDG

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Author

Publications (2)

Proceedings Article | 26 July 1999 Paper

Study of the impact to image quality and overlay by different pupil fills in a DUV scanner via overlay metrology

Kafai Lai, Pedro Tasaico, Theodore Doros, Dan Holladay

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354394

KEYWORDS: Monochromatic aberrations, Point spread functions, Overlay metrology, Distortion, Image quality, Optical aberrations, Scanners, Deep ultraviolet, Phase shifts, Optics manufacturing

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Proceedings Article | 14 June 1999 Paper

Alignment and overlay metrology issues for copper/low-K dual-damascene interconnect

Kafai Lai, Chris Nelson, Mark Breen, Theodore Doros, Dan Holladay

Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350797

KEYWORDS: Optical alignment, Overlay metrology, Photomasks, Chemical mechanical planarization, Semiconducting wafers, Oxides, Copper, Metals, Signal processing, Polymers

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