A new deposition method developed by Goddard Space Flight Center fluorinates Al mirrors with XeF2 followed by a LiF coating to create what they term Al+XeLiF. This in-situ, room temperature process produces mirrors with high reflectivity in a broad spectral range, from the FUV to the IR, and is reported to be stable in relative humidities of 30% and lower. These mirrors are envisioned for missions requiring sensitivity down to 100 nm wavelength such as the habitable worlds observatory. Because most mission integration and testing campaigns require prolonged exposure to lab environments, and launch sites experience high relative humidities (RH) on average, some at 80% RH. We investigate Al+XeLiF stability in a wider range of temperatures and humidities along with employing additional characterization techniques including atomic force microscopy and x-ray photoelectron spectroscopy. We found that Al+XeLiF is stable in environments up to 82%RH when kept at cooler temperatures (3°C and 21°C). However, this material is unstable when stored at 60°C, experiencing roughening and loss in reflection from resulting Al surface plasmon excitation.
Astronomical instrumentation for measurements in the Far Ultraviolet (FUV, 90−200 nm) have historically considered aluminum (Al) thin film mirrors due to this material high reflectance over this wavelength range. However, the native aluminum oxide layer that forms on Al upon exposure to the atmosphere is strongly absorbing in this wavelength range, requiring that the films be protected with a dielectric that inhibits oxidation. Typically, magnesium fluoride (MgF2) or lithium fluoride (LiF) coatings are used as protective layers, but each has shortcomings. For example, MgF2 has an absorption cutoff at 115 nm that reduces performance below this wavelength, which is a critical part of the FUV spectrum for observational astrophysics. The use of LiF as a protection for Al provides a lower absorption cutoff at 100 nm, but it is hygroscopic and thus susceptible to degradation in humid conditions. Our team at GSFC has developed a new reactive Physical Vapor Deposition (rPVD) process that consists of a fluorination process with XeF2 gas combined with our traditional PVD process. We have found that this new rPVD process produces Al+XeF2+LiF (XeLiF) and Al+XeF2+MgF2 (XeMgF2) mirror coatings with unprecedented reflectance. In addition, the rPVD process seems to produce much more environmentally stable coatings (when compared to the conventional process without the XeF2 fluorination). We report on IR/Vis/UV reflectance of XeLiF and XeMgF2 mirrors. The surface roughness as well as the FUV reflectance measured over a period of 8 months for a XeLiF sample with a relatively thin (≃ 30 nm) Al layer are also reported. We have also been investigating the compatibility of this rPVD coating process for potential efficiency enhancements of Si-based gratings. Since it is known that the XeF2 vapor is a strong Si etchant, we are investigating if the native SiO2 layer on Si is sufficient to protect the groove profile of E-beam-ruled Si gratings from degradation. Preliminary results indicate that the native SiO2 layer is an effective barrier against etching of Si by XeF2.
Tabletop extreme ultraviolet (EUV) sources based on high harmonic generation (HHG) have been used as a powerful tool for probing magnetism. Obtaining magnetic information via magneto-optical contrast often requires the energy of the light to be tuned to magnetic resonance energies of the magnetic element present in the material; therefore, it is essential to calibrate the HHG spectrum to well defined absorption energies of materials. We have designed and assembled a HHG based EUV source for studying transition metal magnetic materials at their resonant M-absorption edges (35-75 eV of photon energy). One material of interest is iron, for which the iron M2,3 edge is 52.7 eV (23.5 nm wavelength) according to CXRO. We prepared and characterized a thin sample of iron for absorption spectroscopy and calibration of the absorption edge with beamline 6.3.2 at the Advance Light Source (ALS) in Lawrence Berkeley National Laboratory. This well characterized sample was capped with gold to prevent oxidation. From these measurements we extracted the absorption part of the index of refraction β spectrally and confirmed that the absorption edge of iron is 52.7 eV. With this information, we can better calibrate the HHG spectrum of our tabletop EUV source. Calibration of the HHG spectrum was achieved using model fitting the HHG spectrum using the grating equation and law of cosines while taking account into the results of the ALS data. We have determined that driving wavelength of the HHG process to be 773 nm. We also conclude that the chirp of the driving laser pulse can cause an energy shift to a HHG spectrum.
First Contact (FC) Polymer™, developed by Photonic Cleaning Technologies, is used to clean and protect surfaces from contamination. The polymer creates a peelable coating that renders the surface clean while not leaving visible residues. To investigate the effectiveness of FC at the subnanometer level, we used variable-angle, spectroscopic ellipsometry (VASE) to measure sample top-layer thickness after repeated application/storage/removal cycles of standard (red) FC with three sample sets (CVD Si3N4 on Si, bare Si, and SiO2 on Si). The samples were measured via VASE after every FC removal to understand contaminant thickness changes with “peel-off” count. Control samples were also measured at each iteration. Ellipsometric analysis revealed FC removed, during the first peel-off, impurity from the surface of samples treated with impure isopropyl alcohol. Linear regressions and t-tests comparing samples with and without FC were employed for evaluating changes with peel-off counts. There is evidence for the very slight build-up of material which is not removed by iterative FC application/removal cycles on these samples. It is slight, <0.1 nm after 17 iterations, in the case of native oxide on Si.
Hollow cathode plasmas are common extreme ultraviolet (EUV) lamps used for material characterization. However, the relatively high pressure of the plasma can affect downstream instruments, as well as absorb the EUV. EUV windows are difficult to fabricate due to EUV’s strong interaction with all materials. We present a carbon nanotube (CNT) microfabricated window composed of multiple high aspect-ratio columns in parallel. The open areas allow wide bandpass transmission, while the walls restrict gas flow. We model the CNT window transmission as a weight function on the light from of a Mcpherson 629-like hollow cathode helium plasma in visible wavelengths. We model the CNT window differential pumping as a series of columns between two chambers of different pressures.
Four evaporated, thin-film Al samples protected by a thin (29±2 nm) aluminum fluoride (AlF3) overcoat stored in dry (dew point 276K ), 327 K air over a period of 2500 hours exhibited no significant changes in the thickness of the protective AlF3 layer nor growth in aluminum oxide as observed by variable-angled, spectroscopic ellipsometry. Two of the samples had AlF3 evaporated at T>200°C, two without substrate heating. No difference in aging was noted amongst the samples. Since many months may elapse between fabrication and launch of the completed observatory, this result contributes to understanding the boundaries in temperature and humidity separating negligible changes in fluoride-containing optical components from unacceptable degradation. While negligible changes in thicknesses were observed, there were changes in the ellipsometric data, psi and delta, with time. In this study, we also present our use of an effective medium approximation model in understanding changes in the fluoride layer with aging. The observed changes in SE parameters are here interpreted as changes in void fraction, though the presence of some water was not ruled out. Apparent void fraction fell by a factor of two by the end of the 2500 hours. The decreasing void fraction suggests that the films might be becoming more compact with time. Other surface sensitive techniques such as AFM are needed to narrow down possible explanations for observed changes.
Aluminum mirrors protected by metal fluoride overcoats are crucial for FUV observations. Many contemplated missions specify optics elements with high reflectance down to 103 nm (Lyman beta). Lithium fluoride (LiF) has the highest band gap of any solid material and thus finds applications in FUV optics. However, LiF is difficult to work with because of its hygroscopic nature. The instability of these films was investigated by evaporating LiF onto silicon wafers and aging in environments with different relative humidities and temperatures. Samples were characterized using variable-angle spectroscopic ellipsometry (VASE) and atomic force microscopy (AFM). From these methods we found that storing LiF in a hot environment improved sample surface stability, and that in dry, hot environments, surfaces became more smooth after many hours in storage.
Lithium fluoride (LiF) is difficult to work with because of its hygroscopic nature (it pulls water out of air). The stability limits of LiF thin films and the nature of their failure when exposed to humid air are poorly understood. We show that LiF films undergo irreversible changes in optical properties and microstructure as determined by ellipsometry and SEM when exposed to dew points greater than 6 C. On the other hand, samples stored at a dew point of -22 C (4% RH at room temperature), showed only small changes in ellipsometric parameters. The ones stored at intermediate humidity 6 C (21% RH at room temperature) showed larger changes in ellipsometric parameters. SEM shows that deliquescence as well as efflorescence is important in LiF thin films. In situ spectroscopic ellipsometric measurements using a controlled variable humidity environment illuminates the changes in LiF thin films moving from moisture absorption to complete deliquescence.
Aluminum is the best choice of material for broadband mirrors. However, once an oxide layer forms on the surface of the mirrors the reflectance in the far ultraviolet range decreases. The study of Al mirrors is difficult because they oxidize so quickly in the air. This makes reproducibility and joint work between laboratories difficult because the mirrors will oxidize and make successive measurements inaccurate. We have found that storing aluminum thin-film mirrors in low oxygen environments (such as liquid nitrogen, dry ice, and hexane) retards mirror oxidation. We examined the retardation of the growth of aluminum oxide during storage in these environments. This oxidation retardation was most pronounced when mirrors were stored in liquid nitrogen. In comparing the growth rate of oxide out of storage to that while it was in storage, we found that the apparent growth of aluminum oxide, is 1/500 in liquid nitrogen, 1/200 in hexane and 1/40 in dry ice.
We report on a large-area, high-aspect-ratio, carbon nanotube (CNT) forest structure produced at BYU acting as a window/separator for a hollow cathode EUV lamp. The structure has large-surface-area, high light trans-mission, and differential pumping. CNT fabrication allows for variable dimensions, which allows various EUV distributions and pressure gradients to be possible. Theory is presented for predicting such distributions and gradients. Several structures have been fabricated; their dimensions, properties, and predicted distributions and gradients are given.
To maintain high, broad-band reflectance, thin transparent fluoride layers, such as MgF2, are used to protect the of aluminum mirrors against oxidation since aluminum oxide absorbs short wavelength light. In this study, we present, for the first time, combined X-ray photoelectron spectroscopy (XPS) and ellipsometric (SE) studies of aluminum oxidation as a function of MgF2 over a range of layer thickness (0-6 nm). We also show for the first time, dynamic SE data which, with appropriate modeling, tracks the extent of oxide growth every few seconds over a period of several hours after the evaporated Al + MgF2 bilayer is removed from the deposition chamber, exposing it to the air. For each SE data set, because the optical constants of ultrathin metals films depend strongly on deposition conditions and their thickness, the optical constants for Al, as well as the Al and Al2O3 thicknesses, were fit. SE trends were confirmed by X-ray photoelectron spectroscopy. There is a chemical shift in the Al 2s electron emission peak toward higher binding energy as the metal oxidizes to Al+3. The extent of oxide growth can be modeled from the relative area of each peak once they are corrected for the attenuation through MgF2 layer. This generates an empirical formula: oxide thickness= k*log(t) +b, for the time-dependent aluminum-oxide thickness on aluminum surfaces protected by MgF2 as a function of MgF2 layer thickness. Here, k is a factor which depends only on MgF2 thickness, and decreases with increasing MgF2 thickness. The techniques developed can illuminate other protected mirror systems.
While many materials could be used as IR mirrors, only aluminum has the potential of reaching far into the ultraviolet, as low as 85 nm. Unfortunately, Al oxidizes rapidly when it is exposed to the atmosphere, diminishing the reflectance of bare aluminum mirrors below 200 nm. For terrestrial observations, this is not a large problem, since the Earth’s atmosphere blocks radiation below this wavelength. However, mirrors used in space could use the whole range of aluminum’s reflectance, if a bare, or nearly bare mirror, could be deployed.[1] The compromise to date has been to use a thin UV-transparent, protective barrier composed of magnesium fluoride, lithium fluoride and/or aluminum fluoride. These allow the observation of the Lyman alpha line but light below 110 nm is effectively blocked. We report on our studies of ultrathin fluoride barrier layers and of removable layers which would lie on ultrathin fluoride barriers or directly on the aluminum surface. Removable barriers could be removed shortly before launch or at the mirrors point of use. These removable barriers consist of organic layers like First Contact™ or parylene, inorganic layers like amorphous silicon (a-Si), or a combination of both. We have observed, for example, that ultrathin films of AlF3 (<2.5 nm) are capable of blocking the oxidation of aluminum for several hours in air, long enough to have a removable barrier like First Contact™ applied on their surface. We also report on the effectiveness of ultrathin a-Si as a long-term barrier that may be removable via atomic hydrogen.
Protective layers on aluminum mirror surfaces which can be removed via the use of atomic hydrogen or hydrogen plasmas at the point of use in space may allow an expansion of broad-band mirrors into the EUV. LUVOIR (large, UV-optical-IR telescope) is a potential NASA flagship space-based observatory of the 2020’s or 30’s. It would utilize the largest mirrors ever flown1 . Their reflective coating will almost certainly be aluminum, since such telescopes would profit from truly broad-band mirrors. To achieve reflectance over the broadest band, the top surface of such aluminum mirrors, however, needs to be bare, without the oxide layers that naturally form in air. This will open the 11 to 15 eV band. Since thin aluminum films are largely transparent between 15 and 70 eV an EUV mirror under the aluminum could make EUV bands such as 30.4 nm available for space-based astrophysics without sacrificing mirror IR, visible and UV reflectance. The local space environment for the observatory is sufficiently oxygen-free that the surface should remain bare for decades. We discuss protecting as-deposited aluminum mirrors with robust, oxygenimpenetrable, barrier layers applied in vacuo to the aluminum immediately after deposition and before air contact. The goal is that the barrier could also be cleanly, and relatively easily, removed once the mirror is in space. We propose hydrogen atoms as the means for removing the overcoat, since they can be expected to meet the criteria that the means is gentle enough to not roughen the mirror surface, and does not redeposit material on the mirror or other spacecraft components. We have investigated both organic and inorganic (such as, a-Si) hydrogen-removable films that can be applied to the aluminum immediately after its deposition have been investigated. We also examined the REVAP technique, using Cd and Zn. Agglomeration limited their effectiveness as barrier layers. That and dealing with the reevaporated atoms may limit their utility as barrier materials.
We have measured the reflectance and transmittance of thorium dioxide thin films from 50-280 eV. We have developed several methods for fitting this data that gives the most reliable values for the complex index of refraction, n = 1 - δ + iβ. These fitting methods included fitting film thickness using interference fringes in highly transmissive areas of the spectrum and fitting reflectance and transmittance data simultaneously. These techniques give more consistent optical constants than solitary unconstrained fitting of reflectance as a function of angle. Using these techniques, we have found approximate optical constants for thorium dioxide in this energy range. We found that the absorption edges of thoria were shifted 4 eV and 2 eV to lower energies from those of thorium. We also found that the peak in δ was shifted by 3 eV to lower energy from that of thorium.
We used spectroscopic ellipsometry to determine the optical constants of seven thin-film ThO2 samples deposited by radio-frequency sputtering, thickness ranging between 24 and 578 nm, for the spectral range of 1.2 to 6.5. We used a hollow-cathode light source and vacuum monochromator to measure constants at 10.2 eV. None of the deposition parameters studied including DC-bias voltages successfully increase the n of (that is, densify) thoria films. The value of n at 3.0 eV is 1.86 ± 0.04. We find compelling evidence to conclude that the direct band gap is at ~5.9 eV, clarifying the results of others, some of whom observed the absorption edge below 4 eV. The edge in the two thickest films is of a narrow feature (FWHM=0.4 eV) with modest absorption (α~6μm-1, k~0.1). Absorption may go down briefly with increasing energy (from 6.2 to 6.5 eV). But at 10.2 eV absorption is very high and index low as measured by variable-angle reflectometry, α = 47.3 ± 5.5 μm-1 and k = 0.48 ± 0.05, and n=0.87 ± 0.12.
Uranium oxide and uranium nitride thin films reflect significantly more than all previously known/standard reflectors (e.g., nickel, gold, and iridium) for most of the 4-10 nm range at low angles of incidence. This work includes measurements of the EUV/soft x-ray (2-20 nm) reflectance of uranium-based thin films (~20 nm thick) and extraction of their optical constants (δ and β). We report the reflectances at 5, 10, and 15 degrees grazing incidence of air-oxidized sputtered uranium, reactively sputtered (O2) uranium oxide, and reactively sputtered (N2) uranium nitride thin films measured at Beamline 6.3.2 at the Advanced Light Source (ALS) at Lawrence Berkeley National Laboratory (LBNL). Additionally, we report optical constants of reactively sputtered uranium oxide at nine wavelengths from 4.6 to 17.5 nm derived from ALS angle-scan reflectance measurements. We also report optical constants of uranium nitride at 13 and 14 nm. We compare the reflectance of these uranium-compound thin films to gold, nickel (and nickel oxide), and iridium thin films from 2.5 to 11.6 nm. These metal thin films were chosen for comparison due to their wide use in EUV/soft x-ray applications as low-angle, thin-film reflectors. The uranium compounds can exhibit some surface oxidation in ambient air. There are important discrepancies between UO2’s and UN’s actual thin-film reflectance with those predicted from tabulated optical constants of the elemental constituents of the compounds. These differences are also demonstrated in the optical constants we report. Uranium-based optics applications have important advantages for zone plates, thin-film reflectors, and filters.
Ruthenium is one material that has been suggested for use in preventing the oxidation of Mo/Si mirrors used in extreme ultraviolet (EUV) lithography. The optical constants of Ru have not been extensively studied in the EUV. We report the complex index of refraction, 1 - δ + iβ, of sputtered Ru thin films from 11-14 nm as measured via reflectance and transmission measurements at the Advanced Light Source at Lawrence Berkley National Laboratory. Constants were extracted from reflectance data using the reflectance vs. incidence angle method and from the transmission data by Lambert’s law. We compare the measured indices to previously measured values. Our measured values for delta are between 14-18% less than those calculated from the atomic scattering factors (ASF) available from the Center for X-ray Optics (CXRO). Our measured values of beta are between 5-20% greater than the ASF values.
We present the measured reflectances (Beamline 6.3.2, ALS at LBNL) of naturally oxidized uranium and naturally oxidized nickel thin films from 2.7 to 11.6 nm at 5°, 10°, and 15° grazing incidence. These show that uranium, as UO2, can fulfill its promise as the highest known single surface reflector for this portion of the soft x-ray region, being nearly twice as reflective as nickel in the 5-10 nm region. This is due to its large index of refraction coupled with low absorption. Nickel is commonly used in soft x-ray applications in astronomy and synchrotrons. (Its reflectance at 10° exceeds that of Au and Ir for most of this range.) We prepared uranium and nickel thin films via DC-magnetron
sputtering of a depleted U target and resistive heating evaporation respectively. Ambient oxidation quickly brought the U sample to UO2 (total thickness about 30 nm). The nickel sample (50 nm) also acquired a thin native oxide coating (<2nm). Though the density of U in UO2 is only half of the metal, its reflectance is high and it is relatively stable against further changes. There are important discrepancies between UO2’s actual reflectance with those predicted by the atomic scattering factor model indicative of the need to determine the actual constants of UO2.
The reported optical constants of uranium differ from that of vacuum significantly more than other elements do over the range of about 150 to 350 eV. This suggests that uranium could be used to produce high reflectance imaging mirrors for many soft x-ray applications. Elemental uranium is too chemically active to be used as a front surface mirror without protection. We computed the expected reflectance of carbon-coated uranium films and of uranium-nickel alloys for low-angle reflectors. Carbon is mostly transparent below its K absorption edge at about 283 eV. The reflectance at 10 degrees from grazing is computed to be greater than 50% at 277 eV (C Kα). For comparison, about 5 degrees is the maximum grazing incidence angle for which conventional materials are computed to have comparable reflectance. We sputter deposited and measured the reflectance of carbon-coated uranium layers at 44.7 Å (C Kα). Sample reflectance was a factor of two greater than that of nickel, the material used for low-angle mirrors. The initial oxidation behavior of sputtered uranium-nickel alloys is similar to pure U so their reflectance was not determined. Coatings based on uranium should be considered for all applications where high-reflectance, broadband, low-angle soft x-ray mirrors are required
This paper is a report on our effort to use reflectance measurements of a set of amorphous silicon (a-Si) and uranium (U) multilayer mirrors with an uranium oxide overcoat to obtain the optical constants of a-Si and uranium. The optical constants of U, its oxides, and Si, whether crystalline or amorphous, at 30.4 and 58.4 nm in the extreme ultraviolet (EUV) are a source of uncertainty in the design of multilayer optics. Measured reflectances of multilayer mirror coatings do not agree with calculated reflectances using existing optical constants at all wavelengths. We have calculated the magnitude and the direction of the shift in the optical constants of U and a-Si from reflectivity measurements of DC magnetron sputtered a-Si/U multilayers at 30.4 and 58.4 nm. The reflectivity of the multilayers were measured using a UV hollow cathode plasma light source, a 1 meter VUV monochromator, a back-thinned CCD camera, and a channeltron detector. These reflectance measurements were verified by measurements made at LBNL. The reflectances of the multilayer coatings were measured at 14.5 degrees from normal to the mirror surface. The optical constants were calculated using IMD which uses CURVEFIT to fit the optical constants to reflectivity measurements of a range of multilayer mirrors that varied over a span of 150 - 25.0 nm bilayer thickness. The effects of surface oxide and roughness, interdiffusion, and interfacial roughness were numerically subtracted in fitting the optical constants. The (delta) , (beta) determined at 30.4 nm does not well match the values of c-Si published in the literature (HBOC1), but do approach those of a-Si as reported in literature (HBOC). The difference in the optical constants of c-Si and a-Si are larger than can be attributed to differences in density. Why the optical constants of these two materials vary at 30.4 remains an open question.
We have developed a new family of EUV multilayer mirror coatings using uranium. Using this approach we have coated a set of six mirrors for the EUV Imager, a component of the IMAGE mission. This mission is a Medium Explorer (MIDEX) program, which is scheduled for launch early in 2000. The EUV Imager will study the distribution of He+ in the Earth's plasmasphere by detecting its resonantly scattered emission at 30.4 nm (41 eV) and will produce images of the structure and dynamics of the cold plasma on a global scale. There is, however, a bright emission at 58.4 nm (21 eV), which comes from neutral helium in the earth's ionosphere which also must be blocked. These photons are at too high an energy to filter with aluminum but at too low an energy to have negligible reflectance from most materials commonly used in EUV mirrors. Thus, a multilayer system which satisfied two optical functions, high reflectance (greater than 20%) at 41 eV and low reflectance (less than 2%) at 21 eV, were designed and successfully fabricated. Such mirrors with dual optical functions in the soft x-ray/EUV had not previously been designed or built. These specifications were particularly challenging because many materials have higher single layer reflectances at 58.4 nm than at 30.4 nm. Essentially, the mirror must have low reflectance at 21 eV without loss of reflection at 30.4 nm. This was accomplished. The top part of the multilayer, which reflects well at 30.4 nm, also acts as antireflection layers at 58.4 nm. In the past, multilayers usually have consisted of periodic bilayers. We have explored the use of a periodic mirrors in place of the standard periodic designs. Along the way we have created the computational tools, which include genetic algorithms, to optimize selection of materials and thicknesses. We are currently in the process of building up an EUV characterization system and developing a general way of measuring the optical constants of air-sensitive thin films. We discuss the other material and fabrication challenges faced, which include: (1) The high absorption of almost everything in the EUV. This means that only a few interfaces in a multilayer will contribute to its reflectance. (2) Surface contamination and corrosion. (3) The deposition on flight mirrors that are highly curved (f equals 0.8).
MOXTEK and its collaborators have developed technology for the fabrication of multilayer soft x-ray diffraction gratings. The diffraction gratings we will discuss here are planar, or lamellar amplitude gratings, with a structure similar to that shown in Figure 1 . The gratings we have fabricated and measured consist of a silicon (100) wafer substrate onto which we spin photo-resist. The photo-resist is patterned holographically and the substrate is then etched using reactive plasma processing techniques. The period, or pitch of these gratings Is 0.293 jim, and the grating active area can be as large as 6 cm x 6 cm. The linespace relationship is approximately 50-50. The substrates are etched until the grooves are about 1 200 A deep. This Is done to place the bottom of the grooves deep Into the substrate where It will not be able to scatter x-ray radiation efficiently. A typical substrate is shown in Figure 2.
Our group is studying the structure and interfaces of soft x-ray multilayers by various techniques including x-ray diffraction and Raman spectroscopy. Raman spectroscopy is particularly useful since it is sensitive to the identity of individual bonds and thus can potentially characterize the abruptness of interfaces in multilayers. Blocking interfacial mixing is very important in achieving and maintaining high reflectivity. We report our studies of the as-deposited and postannealed structure of Mo/Si and W/C multilayers. A high normal- incidence, peak reflectance is mandatory for imaging applications that involve many reflections. The reported theoretical and achieved reflectances of the Mo/Si system are 80% and 65%, respectively. This loss of 15% can bring about a six-fold loss in system throughput in the eight-reflection system contemplated. The interfaces in the Mo/Si system are thought to play a significant role in the degrading reflectance so characterization techniques which have interfacial sensitivity are particularly important. The Mo/Si multilayer system is susceptible to Raman characterization since both the a-Si spacer layer and the MoSi2 compound which forms at the interface have Raman active modes. In this paper we report the first Raman studies, to the best of our knowledge, of the a-Si layers and their crystallization and the crystallization of the Mo/Si interface of the multilayer brought about by a one-hour 1000 degree(s)C anneal. These changes are apparent in the Raman spectra before they can be unambiguously detected by x-ray diffraction.
X-ray phase diffraction gratings can be designed to behave in a fashion similar to blazed gratings, directing the majority of the energy into certain desired orders. They should be easy to fabricate using conventional semiconductor production technology, and offer advantages in design flexibility and efficiency over conventional amplitude grating or blazed grating structures. As a multilayered structure, a phase grating has structure in depth as well as across the surface. Most theoretical analyses in the literature treat the embedded structure through simplifying approximations or assumptions. We will discuss a model which treats the embedded structure explicitly using the Fresnel-Kirchhoff integral in the Fraunhofer diffraction limit. This approach produces a set of equations which are identical to the result for an amplitude diffraction grating except for an additional factor which depends on the phase relationships of the various surfaces in the multilayer stack.
We have produced arrays of 10,000 sharp p-type silicon points using an etch plus oxidation method. These points were used as electron emitters. No high vacuum caseation or high temperature cleaning was needed to observe the electron emission. These are seen to be photosensitive sources of electrons at 200 K and 300 K. They were also used to produce AlK(alpha ) x rays. This constitutes the first use of etched, point arrays for generating electrons for x-ray sources.
Soft x-ray filter designs for the Brigham Young University `Goldhelox Project' are discussed. Three polymers intended for use as a supportive substrate for a soft x-ray solar filter having a passband centered at 171 angstroms are examined. The use of polymer substrates is examined because of vibrational and mechanical stresses associated with the shuttle launch, preventing the use of a free standing filter, and because of Goldhelox's special need to locate the filter near the imaging plane. The uniform consistency of a polymer support prevents any imaging of the filter support structure, as would occur if a traditional mesh support were used. The polymer substrates investigated are: AP-1, Formvar, and polypropylene. Their transmissive characteristics of the polymers are examined along with the feasibility of their use. Transmission as a function of energy for each polymer is given over an energy range of 10 to 180 eV.
Infrared optically black baffle surfaces are an essential component of many advanced optical systems. All internal surfaces in advanced infrared optical sensors that require stray light management to achieve resolution are of primary concern in baffle design. Current industrial materials need improvements to meet advanced optical sensor systems requirements for optical, survivability, and endurability. Baffles are required to survive and operate in potentially severe environments. Robust diffuse-absorptive black surfaces, which are (1) thermally and mechanically stable to threats of X-ray, launch, and in-flight maneuver conditions, with specific densities to allow an acceptable weight load, (2) handleable during assembly, (3) cleanable, and (4) adaptive to affordable manufacturing, are required as optical baffle materials. An overview of recently developed advanced infrared optical baffle materials, requirements, manufacturing strategies, and the Optics MODIL (Manufacturing Operations Development and Integration Laboratory) Advanced Baffle Program is discussed.
Beryllium coatings with varying thicknesses and columnar grain sizes were deposited by low
temperature magnetron sputtering and wet chemically etched to enhance diffuse absorption of light.
After etching these coatings exhibited a matte black surface finish and low specular reflectance (below
2%) in the IR up to a critical wavelength dependent upon the original grain size of the coating.
Extremely thick coatings (350 j.tm) with original grain sizes of 10 to 12 j.m were produced which
exhibited specular reflectances below 0.5% up to 50 p.m wavelength and a Lambertian BRDF at 10.6 p.m
averaging 4.3x103 ster1. Scanning electron micrographs are presented for etched and unetched
beryllium coatings which showed the etching process produces roughness and porosity over several size
scales simultaneously with the maximum size scale limited by the initial coating grain size and
thickness. This technique for producing diffuse absorbing baffle materials has great versatility in
choice of coating material and substrate and can be expected to provide optical system designers with a
variety of material options for stray light management.
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