To address the growing needs of the automotive industry for low cost solutions to far infrared imaging, a silicon - silicon
germanium (Si/SiGe) quantum well resistive bolometer technology is presented. The Si/SiGe thermistor structure is
epitaxially grown and combines a high temperature coefficient of resistance (TCR) with low flicker noise. A TCR of
approximately 3%/K for a Ge fraction of 32% is demonstrated. Quantum mechanical calculations show that a minimum
SiGe layer thickness of 8 nm is needed to avoid degradation caused by ground state shift due to carrier confinement in
the SiGe potential wells. In contrast to most of today's bolometer designs, the optical quarter wave cavity needed to
achieve high absorption of radiation is an integral part of the quantum well thermistor structure. Optimization of the full
bolometer design is made where the interaction between optical absorption, heat capacity and electrical properties is
considered and a design approach targeting the lowest noise equivalent temperature difference is presented. As part of
the optimization, it was found that for the best overall solution, optical absorption can be sacrificed in favor for a smaller
heat capacity.
A new low-cost long-wavelength infrared bolometer camera system is under development. It is designed for use with an
automatic vision algorithm system as a sensor to detect vulnerable road users in traffic. Looking 15 m in front of the
vehicle it can in case of an unavoidable impact activate a brake assist system or other deployable protection system. To
achieve our cost target below €100 for the sensor system we evaluate the required performance and can reduce the
sensitivity to 150 mK and pixel resolution to 80 x 30. We address all the main cost drivers as sensor size and production
yield along with vacuum packaging, optical components and large volume manufacturing technologies.
The detector array is based on a new type of high performance thermistor material. Very thin Si/SiGe single crystal
multi-layers are grown epitaxially. Due to the resulting valence barriers a high temperature coefficient of resistance is
achieved (3.3%/K). Simultaneously, the high quality crystalline material provides very low 1/f-noise characteristics and
uniform material properties. The thermistor material is transferred from the original substrate wafer to the read-out
circuit using adhesive wafer bonding and subsequent thinning. Bolometer arrays can then be fabricated using industry
standard MEMS process and materials. The inherently good detector performance allows us to reduce the vacuum
requirement and we can implement wafer level vacuum packaging technology used in established automotive sensor
fabrication. The optical design is reduced to a single lens camera. We develop a low cost molding process using a novel
chalcogenide glass (GASIR®3) and integrate anti-reflective and anti-erosion properties using diamond like carbon
coating.
Pedestrian fatalities are around 15% of the traffic fatalities in Europe. A proposed EU regulation requires the automotive industry to develop technologies that will substantially decrease the risk for Vulnerable Road Users when hit by a vehicle. Automatic Brake Assist systems, activated by a suitable sensor, will reduce the speed of the vehicle before the impact, independent of any driver interaction. Long Wavelength Infrared technology is an ideal candidate for such sensors, but requires a significant cost reduction. The target necessary for automotive serial applications are well below the cost of systems available today. Uncooled bolometer arrays are the most mature technology for Long Wave Infrared with low-cost potential. Analyses show that sensor size and production yield along with vacuum packaging and the optical components are the main cost drivers. A project has been started to design a new Long Wave Infrared system with a ten times cost reduction potential, optimized for the pedestrian protection requirement. It will take advantage of the progress in Micro Electro-Mechanical Systems and Long Wave Infrared optics to keep the cost down. Deployable and pre-impact braking systems can become effective alternatives to passive impact protection systems solutions fulfilling the EU pedestrian protection regulation. Low-cost Long Wave Infrared sensors will be an important enabler to make such systems cost competitive, allowing high market penetration.
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