Mr. Donghun Shin Profile

Donghun Shin

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Analysis method to define photoresist resolution in EUV lithography

Yongbeom Seo, Heeyoung Go, Jinseong Lee, Taehwan Oh, Donghun Shin, Huiseob Shin, Jisun Lee, Sangjin Kim, In-sung Kim, Changmin Park

Proceedings Volume 12750, 127500B (2023) https://doi.org/10.1117/12.2687461

KEYWORDS: Extreme ultraviolet lithography, Critical dimension metrology, Stochastic processes, Optical lithography, Bridges, Scanning electron microscopy, Resistance, Photoresist materials, Extreme ultraviolet, Metals

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