Shunt capacitive radio-frequency microelectromechanical (RF MEMS) switches were modelled, fabricated and characterized in the K-band domain. Design allowed to predict the RF behaviour of the switches as a function of the bridge geometric parameters. The modelled switches were fabricated on silicon substrate, using a surface micromachining approach. In addition to the geometric parameters, the material structure in the bridge-actuator area was modified for switches fabricated on the same wafer, thanks to the removal/addition of two technological steps of crucial importance for RF MEMS switches performance, which are the use of the sacrificial layer and the deposition of a floating metal layer on the actuator. Surface profilometry analysis was used to check the material layer structure in the different regions of the bridge area as well as to investigate the mechanical behaviour of the moveable bridge under the application of a loaded force. The RF behaviour of all the fabricated switches was measured, observing the impact on the isolation of the manipulation of the bridge size and of the variations in the fabrication process.
Digital holography (DH) is a well-established interferometric tool in optical metrology allowing the investigation of engineered surface shapes with microscale lateral resolution and nanoscale axial precision. With the advent of charged coupled devices (CCDs) with smaller pixel sizes, high speed computers and greater pixel numbers, DH became a very feasible technology which offers new possibilities for a large variety of applications. DH presents numerous advantages such as the direct access to the phase information, numerical correction of optical aberrations and the ability of a numerical refocusing from a single hologram. Furthermore, as an interferometric method, DH offers both a nodestructive and no-contact approach to very fragile objects combined with flexibility and a high sensitivity to geometric quantities such as thicknesses and displacements. These features recommend it for the solution of many imaging and measurements problems, such as microelectro-optomechanical systems (MEMS/MEOMS) inspection and characterization. In this work, we propose to improve the performance of a DH measurement on MEMS devices, through digital filters. We have developed an automatic procedure, inserted in the hologram reconstruction process, to selectively filter the hologram spectrum. The purpose is to provide very few noisy reconstructed images, thus increasing the accuracy of the conveyed information and measures performed on images. Furthermore, improving the image quality, we aim to make this technique application as simple and as accurate as possible.
We develop shunt capacitive RF MEMS switches in III-V technology making use of materials which can be alternative
to the ones commonly used, in order to overcome some technological constraints concerning the RF MEMS reliability.
Specifically, we evaluate the potential of tantalum nitride (TaN) and tantalum pentoxide (Ta2O5) to be used for the
switches actuation pads and dielectric layers, respectively. To this scope, a compositional, structural and electrical
characterization of TaN and Ta2O5 films as a function of the deposition parameters, such as the substrate temperature and
the sputtering mixture composition, is performed. The realized switches show good actuation voltages, in the range 15-
20 V, an insertion loss better than -0.8 dB up to 30 GHz, and an isolation of ~ -40 dB at the resonant frequency. A
comparison between the measured S-parameter values and the results of a circuit simulation is also presented and
discussed, providing useful information on the operation of the fabricated switches.
In this work we describe a family of optical devices based on heterojunction and heterodimensional structures and we investigate their static and dynamic properties. Such devices are good candidates, due to their high performance, for utilization as the sensing element for the realization of sensors in the fields of telecommunications, remote sensing, LIDAR and medical imaging.
First, we present a Heterostructure Metal-Semiconductor-Metal (HMSM) photodetectors that employ a uniformly doped GaAs/AlGaAs heterojunction for the dual purpose of barrier height enhancement and creating an internal electric field that aids in the transport and collection of the photogenerated electrons. In this first family of devices, two doping levels are compared showing the direct effect of the aiding field due to modulation doping.
Subsequently, we analyze a novel Resonant-Cavity-Enhanced (RCE) HMSM photodetector in which a Distributed Bragg Reflector (DBR) is employed in order to reduce the thickness of the absorption layer thus achieving good responsivity and high speed as well as wavelength selectivity.
Current-voltage, current-temperature, photocurrent spectra, high-speed time response, and on-wafer frequency domain measurements point out the better performance of this last family of detectors, as they can operate in tens of Giga-Hertz range with low dark current and high responsivity. Particularly, the I-V curves show a very low dark current (around 10 picoamps at operative biases); C-V measurements highlight the low geometrical capacitance values; the photocurrent spectrum shows a clear peak at 850 nm wavelength, while time response measurements give a 3 dB bandwidth of about
30 GHz. Small signal model based on frequency domain data is also extracted in order to facilitate future photoreceiver
design. Furthermore, two-dimensional numerical simulations have been carried out in order to predict the electrical properties of these detectors.
Combination of very low dark current and capacitance, fast response, wavelength selectivity, and compatibility with high electron mobility transistors makes these devices especially suitable for the above-mentioned applications.
Sol-gel organic synthesis of SnO2 thin films from tin ethoxide precursor is reported here as a promising and cheap alternative of the 'classical' chemical and physical preparation methods of the SnO2 thin films, for gas sensing applications. A simple, integrated circuit compatible test structure, for rapid evaluation of the sensing properties of the SnO2 sol-gel derived thin films is described. The main features of our microstructure consists of a a heating resistor integrated on chip, made of highly boron doped silicon and a metallization system from Au/W deposited on a planarized chemically vapor deposited SiO2 layer. The SnO2 films have shown the well-known increase-maximum-decrease dependence of chemoresistance as a function of temperature, with a maximum at about 380 degrees C, when they are measured in clean, dry air. The sensitivity of SnO2 films to high concentration of H2 in air was studied within a quartz furnace, externally heated in the temperature range from 200 to 450 degrees C. The relative sensitivity is equal to 100 percent at temperatures as low as 200 degrees C, while its maximum value is anticipated to be above 450 degrees C. The CO sensing properties of SnO2 layers were evaluated as a function of input power applied on the integrated heating resistor. We have obtained relative sensitivities of 30 percent for 500 ppm CO concentration in dry air and an input power of 209 mW.
The difficulty to achieve a refractive index matching between active substrate and active layer grown on, is one of the main problem in integrated optical devices based on gallium arsenide, because of its high refractive index value. One possible solution could be an active layer whose refractive index is variable during the grown. Zinc oxide is a very interesting material because of its electro-optic and acousto- optic properties. It has a low cost and can be prepared by a variety of techniques. In this paper deposition of lithium doped zinc oxide films by reactive sputtering has been investigated in order to study the dependence of optical properties on lithium content and deposition parameters. A ZnO:Li target was used. The film depositions were performed varying the oxygen content in sputtering gas. For comparison undoped ZnO films were also prepared. We have performed optical and electrical measurement on films relating the results to Li contents and O/Zn ratio obtained by nuclear reaction and Rutherford backscattering measurements respectively. The film analysis has shown that dopant concentration is mainly controlled by gas mixture. The optical properties are dependent on deposition conditions. Optical waveguides have been prepared and characterized. The results are presented and discussed.
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