Mr. Geoffrey A. Gaines Profile

Geoffrey A. Gaines

at Lawrence Berkeley National Lab

SPIE Involvement:

Author

Publications (22)

Proceedings Article | 23 March 2020 Presentation + Paper

Presentation + Paper

How we are making the 0.5-NA Berkeley mirco-field exposure tool stable and productive

Chris Anderson, Arnaud Allezy, Weilun Chao, Lucas Conley, Carl Cork, Will Cork, Rene Delano, Jason DePonte, Michael Dickinson, Geoff Gaines, Jeff Gamsby, Eric Gullikson, Gideon Jones, Lauren McQuade, Ryan Miyakawa, Patrick Naulleau, Seno Rekawa, Farhad Salmassi, Brandon Vollmer, Daniel Zehm, Wenhua Zhu

Proceedings Volume 11323, 113230B (2020) https://doi.org/10.1117/12.2552125

KEYWORDS: Mirrors, Scanners, Semiconducting wafers, Scanning electron microscopy, Camera shutters, Image processing, Vibration isolation, Projection systems

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Proceedings Article | 26 March 2019 Presentation + Paper

Presentation + Paper

Overview and status of the 0.5NA EUV microfield exposure tool at Berkeley Lab

Christopher Anderson, Arnaud Allezy, Weilun Chao, Carl Cork, Will Cork, Rene Delano, Jason DePonte, Michael Dickinson, Geoff Gaines, Jeff Gamsby, Eric Gullikson, Gideon Jones, Stephen Meyers, Ryan Miyakawa, Patrick Naulleau, Senajith Rekawa, Farhad Salmassi, Brandon Vollmer, Daniel Zehm, Wenhua Zhu

Proceedings Volume 10957, 1095708 (2019) https://doi.org/10.1117/12.2516339

KEYWORDS: Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Extreme ultraviolet lithography, Optical lithography, Monochromatic aberrations, Line width roughness, Photoresist materials, Image processing, Projection systems

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Proceedings Article | 26 March 2019 Paper

Paper

Achieving diffraction-limited performance on the Berkeley MET5

Ryan Miyakawa, Chris Anderson, Wenhua Zhu, Geoff Gaines, Jeff Gamsby, Carl Cork, Gideon Jones, Michael Dickenson, Seno Rekawa, Weilun Chao, Sharon Oh, Patrick Naulleau

Proceedings Volume 10957, 109571X (2019) https://doi.org/10.1117/12.2516384

KEYWORDS: Wavefronts, Diffraction gratings, Interferometry, Shearing interferometers, Optical alignment, Diffraction, Optical design, Sensors, Multiplexing, Monochromatic aberrations

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Proceedings Article | 12 October 2018 Presentation

Presentation

Berkeley MET5 update: commissioning, interferometry, and first prints (Conference Presentation)

Ryan Miyakawa, Wenhua Zhu, Geoff Gaines, Chris Anderson, Patrick Naulleau

Proceedings Volume 10809, 1080911 (2018) https://doi.org/10.1117/12.2501953

KEYWORDS: Wavefronts, Error analysis, Interferometry, Data modeling, Extreme ultraviolet, Shearing interferometers, Monochromatic aberrations, Projection lithography, Objectives, Optical resolution

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The Berkeley MET5, funded by EUREKA, is the world’s highest-resolution EUV projection lithography tool. With a 0.5-numerical aperture (NA) Schwartzchild objective, the Berkeley MET5 is capable of delivering 8-nm resolution for dense line/space patterns. In order to achieve this resolution, optical aberrations must be accurately characterized and compensated, a task that is complicated by the difficulty in finding a bright, high quality reference wave, and nonlinear effects associated with high incident angles on interferometry targets. The Berkeley MET5 was designed with an in-situ lateral shearing interferometer (LSI) to provide real-time wavefront diagnostics alongside its imaging capabilities. The geometry of the MET5 makes it a particularly difficult optical system to measure interferometrically. Unlike EUV production tools, the 2-bounce Schwartzchild design is non-telecentric at the image, with an image plane whose normal vector is tilted 1.12 degrees with respect to the optical axis. Shearing interferometers have shown good results measuring EUV wavefronts at low to medium NAs (0.1 - 0.33) with telecentric geometry. However, to accommodate the MET5 geometry, a generalized model of LSI was developed to inform the design and build of a lateral shearing interferometer capable of operating at high-NA and with a tilted image plane. This model predicts non-negligible systematic errors that must be compensated in the analysis. Specialized pinhole arrays were patterned onto the mask to fill the pupil with spatially filtered light that is incoherently multiplexed from multiple apertures. Due to the relatively large amount of DC flare compared with the signal in the interferograms, illumination profiles were chosen to match the NA of the obscuration so that zero-order light coming through the mask absorber is blocked in the pupil, which results in a finite coherence function width. Because of this, the design of the arrays required balancing the efficiency of the pattern while maintaining enough separation between apertures to accommodate the coherence function width. Analysis of the interferometric data shows a total RMS wavefront error of 0.6 nm after removal of systematic errors predicted by the LSI model. The bulk of this error lies in astigmatism and coma terms which can be corrected by field position and small adjustments to the alignment of the Schwartzchild optic respectively. The aberration signature of this wavefront is in good agreement with preliminary print data of aberration targets according to aerial image modeling of these features. The interferometric capability of the Berkeley MET5 is an indispensable part of commissioning the tool, and will allow for the diagnosing and monitoring of tool performance as it begins user operations in the coming months.

Proceedings Article | 3 April 2018 Open Access

Open Access

Paper

High performance UV/visible microchannel plate delay line detector technologies

Oswald Siegmund, Jeff Hull, R. Raffanti, M. Gummin, G. Naletto, G. Gaines, J. Stock

Proceedings Volume 10570, 105702D (2018) https://doi.org/10.1117/12.2326639

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Proceedings Article | 3 September 2008 Paper

Paper

CHIPS microsatellite optical system: lessons learned

M. Sholl, Geoff Gaines, Martin Sirk, Ellen Taylor, Mark Hurwitz

Proceedings Volume 7071, 707104 (2008) https://doi.org/10.1117/12.799573

KEYWORDS: Sensors, Spectroscopy, Observatories, Satellites, Spectrographs, Aluminum, Space operations, Visible radiation, Microchannel plates, Sun

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Proceedings Article | 15 September 2004 Paper

Paper

GOES solar EUV detector calibration at the NSLS

John Wise, Geoffrey Gaines, Arthur Gaudet, Mark Gummin, Fred Hanser, Allen Harris, Stephen Hersey, Benjawan Kjornrattanawanich

Proceedings Volume 5549, (2004) https://doi.org/10.1117/12.559986

KEYWORDS: Extreme ultraviolet, Photodiodes, Calibration, Sensors, Data modeling, Prototyping, Solar energy, Visible radiation, Error analysis, Diffraction gratings

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Proceedings Article | 8 December 2003 Paper

Paper

Performance of the Cosmic Hot Interstellar Plasma Spectrometer

Martin Sirk, Geoffrey Gaines, E. Taylor, Michael Sholl, Wiliam Marchant, Richelieu Hemphill, Randy Kimble, Timothy Sasseen, Mario Marckwordt, William Donakowski

Proceedings Volume 5164, (2003) https://doi.org/10.1117/12.515601

KEYWORDS: Sensors, Spectrographs, Calibration, Optical filters, Extreme ultraviolet, Spectroscopy, Plasma, Microchannel plates, Stray light, Light scattering

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Proceedings Article | 8 December 2003 Paper

Paper

EUV detector of the Cosmic Hot Interstellar Plasma Spectrometer

Mario Marckwordt, Geoffrey Gaines, Jerry Edelstein, Richelieu Hemphill, Jeffrey Hull, Mark Hurwitz, Michael Lampton, Ken McKee, Timothy Sasseen, Michael Sholl, Oswald Siegmund, Martin Sirk, Ellen Taylor

Proceedings Volume 5164, (2003) https://doi.org/10.1117/12.512279

KEYWORDS: Sensors, Microchannel plates, Quantum efficiency, Aluminum, Zirconium, Optical filters, Extreme ultraviolet, Thin films, Plasma, Spectroscopy

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Proceedings Article | 8 December 2003 Paper

Paper

Optics design and performance for the Cosmic Hot Interstellar Plasma Spectrometer (CHIPS)

Michael Sholl, William Donakowski, Geoffrey Gaines, Michael Lampton, Mark Hurwitz, Martin Sirk, Ellen Taylor

Proceedings Volume 5164, (2003) https://doi.org/10.1117/12.515602

KEYWORDS: Spectroscopy, Sensors, Aluminum, Actuators, Observatories, Space operations, Calibration, Visible radiation, Spectrographs, Shape memory alloys

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Proceedings Article | 24 February 2003 Paper

Paper

Status of the Cosmic Hot Interstellar Plasma Spectrometer (CHIPS) university-class explorer project

Mark Hurwitz, Robert Davis, Simon Dawson, Patricia Dobson, William Donakowski, Assi Friedman, Geoffrey Gaines, Jerry Edelstein, Richelieu Hemphill, Jane Hoberman, Jeffrey Janicik, Patrick Jelinsky, Michael Lampton, Wiliam Marchant, Mario Marckwordt, Jareb Mirczak, Timothy Sasseen, Michael Sholl, Oswald Siegmund, Martin Sirk, David Stone, Steven Sulack, Ellen Riddle Taylor, Michael Veno, Jonathan Wolff

Proceedings Volume 4854, (2003) https://doi.org/10.1117/12.459823

KEYWORDS: Sensors, Space operations, Plasma, Spectroscopy, Microchannel plates, Calibration, Spectrographs, Extreme ultraviolet, Iron, Photons

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Proceedings Article | 10 December 2001 Paper

Paper

HST-COS far-ultraviolet detector: final ground calibration

John Vallerga, Jason McPhate, Adrian Martin, Geoffrey Gaines, Oswald Siegmund, Erik Wilkinson, Steven Penton, Stephane Beland

Proceedings Volume 4498, (2001) https://doi.org/10.1117/12.450052

KEYWORDS: Sensors, Microchannel plates, Calibration, Quantum efficiency, Spatial resolution, Spectrographs, Diodes, Hubble Space Telescope, Signal to noise ratio, Amplifiers

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Proceedings Article | 18 December 2000 Paper

Paper

On-orbit performance of the double delay line detectors for the Far Ultraviolet Spectroscopic Explorer

David Sahnow, Mark Gummin, Geoffrey Gaines, Alex Fullerton, Mary Elizabeth Kaiser, Oswald Siegmund

Proceedings Volume 4139, (2000) https://doi.org/10.1117/12.410518

KEYWORDS: Sensors, Microchannel plates, Electronics, Spectrographs, Far ultraviolet, Lamps, Quantum efficiency, Photons, UV-Vis spectroscopy, Spectroscopy

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Proceedings Article | 18 December 2000 Paper

Paper

Cosmic Origins Spectograph FUV detector

Jason McPhate, Oswald Siegmund, Geoffrey Gaines, John Vallerga, Jeffrey Hull

Proceedings Volume 4139, (2000) https://doi.org/10.1117/12.410539

KEYWORDS: Sensors, Microchannel plates, Electronics, Quantum efficiency, Spectrographs, Far ultraviolet, Optical amplifiers, Astrophysics, Spatial resolution, Photomasks

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Proceedings Article | 28 July 2000 Paper

Paper

On-orbit performance of the Far Ultraviolet Spectroscopic Explorer (FUSE)

David Sahnow, Henry Moos, Thomas Ake, B. Andersson, Martial Andre, David Artis, Alice Berman, William Blair, Kenneth Brownsberger, Humberto Calvani, Pierre Chayer, Steven Conard, Paul Feldman, Scott Friedman, Alex Fullerton, Geoffrey Gaines, James Green, Mark Gummin, J. Joyce, Mary Elizabeth Kaiser, Jeffrey Kruk, Don Lindler, Derck Massa, Edward Murphy, William Oegerle, Raymond Ohl, Steven Osterman, Bryce Roberts, Katherine Roth, Ravi Sankrit, Kenneth Sembach, Robin Shelton, Oswald Siegmund, Harold Weaver, Erik Wilkinson

Proceedings Volume 4013, (2000) https://doi.org/10.1117/12.394015

KEYWORDS: Sensors, Mirrors, Satellites, Far ultraviolet, Silicon carbide, Spectrographs, Calibration, UV-Vis spectroscopy, Laser induced fluorescence, Line width roughness

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Proceedings Article | 15 October 1997 Paper

Paper

Performance of the double delay line microchannel plate detectors for the Far-Ultraviolet Spectroscopic Explorer

Oswald Siegmund, Mark Gummin, Joseph Stock, Giampiero Naletto, Geoffrey Gaines, Richard Raffanti, Jeffrey Hull, Robert Abiad, Ted Rodriguez-Bell, Tony Magoncelli, Patrick Jelinsky, William Donakowski, Karl Kromer

Proceedings Volume 3114, (1997) https://doi.org/10.1117/12.283775

KEYWORDS: Microchannel plates, Sensors, Electronics, Quantum efficiency, Image segmentation, Amplifiers, Information operations, Spectroscopy, Spatial resolution, Image resolution

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Proceedings Article | 1 September 1995 Paper

Paper

Microchannel plates for the UVCS and SUMER instruments on the SOHO satellite

Oswald Siegmund, Mark Gummin, Timothy Sasseen, Patrick Jelinsky, Geoffrey Gaines, Jeffrey Hull, Joseph Stock, Michael Edgar, Barry Welsh, Sharon Jelinsky, John Vallerga

Proceedings Volume 2518, (1995) https://doi.org/10.1117/12.218388

KEYWORDS: Microchannel plates, Sensors, Modulation, Quantum efficiency, Lamps, Information operations, Ultraviolet radiation, Calibration, Spectrographs, Solar processes

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Proceedings Article | 16 September 1994 Paper

Paper

Delay-line detectors for the UVCS and SUMER instruments on the SOHO Satellite

Oswald Siegmund, Joseph Stock, Daniel Marsh, Mark Gummin, Richard Raffanti, Jeffrey Hull, Geoffrey Gaines, Barry Welsh, B. Donakowski, Patrick Jelinsky, Timothy Sasseen, James Tom, B. Higgins, Tony Magoncelli, Jon Hamilton, Steven Battel, Arthur Poland, Murzy Jhabvala, K. Sizemore, James Shannon

Proceedings Volume 2280, (1994) https://doi.org/10.1117/12.186839

KEYWORDS: Sensors, Microchannel plates, Electronics, Modulation, Amplifiers, Power supplies, Computer programming, Control systems, Resistance, Solar processes

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Proceedings Article | 8 October 1992 Paper

Paper

Characteristics of square-pore and low-noise microchannel-plate stacks

Oswald Siegmund, Daniel Marsh, Joseph Stock, Geoffrey Gaines

Proceedings Volume 1743, (1992) https://doi.org/10.1117/12.130689

KEYWORDS: Microchannel plates, Modulation, Glasses, Sensors, Extreme ultraviolet, X-rays, Gamma radiation, Quantum efficiency, X-ray astronomy, Microscopes

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Proceedings Article | 1 November 1990 Paper

Paper

Highly curved microchannel plates

Oswald Siegmund, Scott Cully, Geoffrey Gaines, William Priedhorsky, Jeffrey Bloch, John Warren

Proceedings Volume 1344, (1990) https://doi.org/10.1117/12.23263

KEYWORDS: Microchannel plates, Prototyping, Laser induced damage, Extreme ultraviolet, X-rays, Gamma radiation, Sensors, Surface finishing, Detector development, X-ray astronomy

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Proceedings Article | 1 November 1990 Paper

Paper

Photoelectron energy spectra of opaque photocathodes in the extreme and far ultraviolet

Oswald Siegmund, Geoffrey Gaines

Proceedings Volume 1344, (1990) https://doi.org/10.1117/12.23243

KEYWORDS: Microchannel plates, Electrons, Extreme ultraviolet, X-rays, X-ray astronomy, Gamma radiation, Opacity, Signal detection, Absorption, Sensors

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Proceedings Article | 1 November 1990 Paper

Paper

Design, performance, and calibration of the ALEXIS ultrasoft x-ray telescopes

Jeffrey Bloch, Frank Ameduri, William Priedhorsky, Diane Roussel-Dupre, Barham Smith, Oswald Siegmund, Scott Cully, John Warren, Geoffrey Gaines

Proceedings Volume 1344, (1990) https://doi.org/10.1117/12.23248

KEYWORDS: Mirrors, Sensors, Telescopes, Reflectivity, Calibration, Space telescopes, X-ray telescopes, Extreme ultraviolet, X-rays, Microchannel plates

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Showing 5 of 22 publications

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