We report recent developments in Bragg soliton dynamics on an ultra-silicon-rich nitride chip, including gap soliton-based tunable slow light and pure quartic Bragg solitons.
Silicon-rich nitride (SRN) devices provide higher optical nonlinearity than stoichiometric silicon nitride. Their growth using CMOS-compatible chemical vapor deposition allows their composition to be tunable. Conventional SRN typically utilizes silane gas which introduces absorption overtones at the 1.55μm wavelength region. As is also the case with stoichiometric silicon nitride, high temperature annealing can be used to reduce Si-H based absorption. An alternate approach towards eliminating Si-H absorption is by replacing silane gas with deuterated silane. The substitution of Si-H with Si-D induces a blue shift in the wavenumber of the bond absorption, thus removing the absorption overtone at the telecommunications region. Consequently, deuterated SRN provides lower material losses compared to non-deuterated SRN, while providing a design degree of freedom for tailoring its linear and nonlinear refractive indices. We present the material properties for deuterated SRN and its application towards linear and nonlinear photonic devices. We demonstrate improved device losses when deuterated SRN is used compared to non-deuterated SRN. We further quantify the optical properties and nonlinearity of grown films and demonstrate low power parametric wavelength conversion in deuterated SRN ring resonators.
A high-quality heralded single photon source is realized on silicon-on-insulator (SOI) platform. With the help of specially designed ultra-low loss fiber-chip edge couplers, the heralding efficiency of the single photon source system is 56%, after calibrating for a 38% detector efficiency. Compared with the state of the art, this measured heralding efficiency marks a new milestone for integrated, on-chip silicon sources.
We designed and fabricated a -0.64 dB loss hybrid coupling platform for silicon chips. The coupler is also stable enough to maintain within +-0.1 dB coupling fluctuation against 20 um fiber holder movement. This feature allows a constant photon stream over ten days with no active alignment mechanism. Furthermore, the fiber is engineered with centimeterlong small-core fiber spliced on the tip. This minimizes Raman noise and provides high stability compared with other coupling solutions based on ordinary UHNA fibers or lensed fibers.
We present an improved CMOS-compatible USRN material prepared using DCS-based chemistry deposited at a low temperature of ~300°C. Morphology and composition of these USRN films are characterized using SEM, TEM, EDS and AFM. Surface profilometer is also used to estimate the film stress over an 8-inch wafer. TEM shows that the USRN film is amorphous and AFM measures a low roughness RMS of ~0.4 nm over a scan window of 3 μm x 3 μm. Optical properties of these USRN films are studied using variable-angle spectroscopic ellipsometry and FTIR spectroscopy. A prism coupler is used to estimate the film propagation loss. Ellipsometry measurement shows refractive index of around 3.09 at 1550 nm wavelength, which is our wavelength of interest. Comparing with USRN films prepared using SiH4- based chemistry, FTIR characterization shows reduced absorbance for films prepared using DCS-based chemistry at wavenumber region where Si-H bonds are located. The absorbance caused by N-H bonds are comparable for USRN films prepared using both DCS-based and SiH4-based chemistries. Si-H bonds and N-H bonds are expected to be the main sources of material absorption near 1550 nm in the USRN material. Characterization results of waveguides fabricated using USRN deposited by this DCS-based chemistry shows propagation loss of ~4.9 dB/cm for waveguide width of 1.5 μm at 1550 nm wavelength. The improved results of DCS-based USRN will help to further cut losses and therefore enhance the performance of CMOS compatible USRN devices in nonlinear signal processing.
Integrated photonic nanostructures provide powerful degrees of design freedom for the engineering of light confinement and advanced lightwave manipulation functions. The ability to tailor field profiles in these on-chip devices allows enhanced light-matter interaction, strong modal confinement and the ability to engineer dispersion. Here, we present recent developments in photonic integrated circuits towards the generation of solitons, amplification, and optical waveform manipulation. By harnessing CMOS platforms with a high nonlinear figure of merit, the existence of on-chip Bragg solitons, Bragg soliton fission and solitons in photonic waveguides are experimentally observed. These demonstrations are made possible by 1,000X larger dispersion close to the band edge in on-chip Bragg gratings, an effect that arises from the interaction of forward and backward propagating fields. In addition, efficient parametric processes facilitate wavelength conversion of light and high gain amplification of signals. These efficient nonlinear mechanisms provide a possible pathway in which to realize new approaches to efficiently manipulate optical waveforms.
Correlated single photons provide a means to drive applications such as quantum computing and quantum communications. Correlated single photons can be generated via parametric down conversion in second–order nonlinear media or spontaneous four–wave mixing in third–order nonlinear media. In particular, complementary metal–oxide–semiconductor (CMOS) technology allows for seamless integration with electronics, providing the potential for a completely on-chip solution for quantum information processing. Ultra–silicon–rich nitride platform is a backend CMOS compatible platform, that has already been used to obtain high gain optical parametric amplification, wideband supercontinuum and enhanced nonlinearity in photonic crystal waveguides due to its large nonlinearity. In this work, we demonstrate correlated photon pair generation based on spontaneous four–wave mixing using ultra-silicon-rich nitride waveguides for the application in CMOS–based optical quantum technologies.
A CW pump at a wavelength of 1555.747nm amplified using an EDFA is filtered through five wavelength division multiplexers (WDM) with a bandwidth of 1.2nm, providing 175dB suppression of EDFA induced pump sideband noise. The filtered quasi–TE pump, adjusted using a fiber polarization controller, is coupled into an ultra–silicon–rich nitride waveguide using a lensed fiber. A SiO2 cladded waveguide with a width of 550nm and height of 300nm possesses a high nonlinear parameter of 530W^-1/m with anomalous dispersion necessary for spontaneous four-wave mixing. The waveguide output is coupled into a lensed fiber and 7 cascaded WDMs are used to provide 245dB of residual pump filtration. The pump–suppressed output is spectrally separated into signal/idler part using WDMs. We refer to lower (higher) frequency photon as the signal (idler). The spontaneously generated signal and idler photons are filtered using cascaded tunable band pass filters (OTF) centered at 1571.24nm and cascaded WDMs centered at 1540.56nm, respectively. The bandwidth of the tunable OTF and WDM is 0.5nm and 1.2nm, therefore the correlated signal/idler photons are observed within the bandwidth window of 0.5nm induced by the OTF. The signal and idler photons are measured using InGaAs/InP avalanche photodetectors. The time correlation between signal and idler photons is obtained using a time interval analyzer with a detection efficiency of 20% and dead time of 15μs.The time bin is set to 81ps and the photon collection time is 240s. The coincidence peak is located ~11ns in the time–bin histogram due to the optical-path difference between the tunable OTF and WDM at respective signal and idler sides. The experimental raw coincidence counts (Hz), calculated by subtracting the accidental rate from the coincidence peak, show a quadratic increase with respect to coupled pump power. At the maximum coupled power of 5mW, the raw coincidence count is ~1Hz. We achieve a raw coincidence–to–accidental ratio (CAR) of up to 3. Therefore, we succeeded to observe correlated photon pair generation based on spontaneous four–wave mixing using the ultra–silicon–rich-nitride waveguide as a CMOS compatible platform, for future applications in quantum technologies.
Four–wave mixing (FWM) serves as the physical basis for various nonlinear phenomena including wavelength conversion, parametric amplification, and frequency combs. FWM on a chip has been implemented using CMOS platforms, chalcogenide glasses and III–V materials. On-chip, waveguide based stimulated FWM techniques have been mostly demonstrated using a coherent pump and coherent signal to focus on broadband spectral tuning for operation in high–speed and multi–channel wavelength division multiplexing network. Though FWM using incoherent light has the potential to provide large optical conversion efficiency, such demonstrations remain largely confined to fiber–experiments and involved narrow–band signals/idlers. Furthermore, the FWM based on a pulsed laser and a broadband incoherent source has yet to be implemented. In this work, we demonstrate integrated ultra–silicon–rich nitride parametric converters that perform wavelength conversion of a broadband incoherent source with a bandwidth of ~100nm at the -20dB level. A 500fs pulsed pump is combined with an incoherent superluminescent diode (SLD) as the signal and parametric gains between 12dB – 27dB is demonstrated as well as cascaded FWM. A 500fs pulsed laser centered at 1.555μm and an incoherent SLD with a 20dB bandwidth spanning from 1.6 – 1.7μm are used as the pump and signal respectively. The pump and signal are combined with a wavelength division multiplexer and coupled into an ultra–silicon–rich nitride waveguide with 10mm length, 700nm width and 400nm height. The waveguide is designed to have a larger nonlinear parameter of 330W^-1/m while possessing anomalous dispersion of -0.92ps^2/m, necessary for phase matched parametric conversion. At a coupled peak power of 4.6W, an idler spanning from 1.43 – 1.52μm at the -20dB level is generated. At a maximum input signal power of 0.71mW, a second idler appears at the blue side of the first generated idler because of cascaded FWM induced between pump of 1.555μm and the first idler peak of 1.48μm. At a coupled peak power of 2.8W, an idler spanning from 1.46 to 1.52μm is generated. The experimental idler bandwidth agrees well with the calculation based on degenerate FWM phase–matching condition. The broadened idler powers are calculated by integrating the energy of each signal and idler with respect to wavelength to obtain optical conversion efficiencies. The integrated idler power is 3.4dBm and 13.4dBm, corresponding to idler parametric gain of 12dB and 18dB respectively at a coupled peak power of 2.8 and 4.6W, respectively. The application of the SLD signal to a supercontinuum that is generated at a coupled peak power of 26W spectrally spanning 1.1 – 1.7μm is observed to generate an idler power of 14dBm within the wavelength range of 1.18 – 1.42μm as well as an idler conversion efficiency/gain of 27dB. Therefore, we achieved broadband wavelength conversion based on stimulated FWM using a pulsed pump and broadband incoherent signal that facilitate the spectrum spanning from 100nm, sufficient to cover parts of the E– and S–bands an representing large conversion efficiency and parametric gains of 12dB – 27dB.
We present a library of high-performance passive and active silicon photonic devices at the C-band that is specifically designed and optimized for edge-coupling-enabled silicon photonics platform. These devices meet the broadband (100 nm), low-loss (< 2dB per device), high speed (≥ 25 Gb/s), and polarization diversity requirements (TE and TM polarization extinction ratio ≤ 25 dB) for optical communication applications. Ultra-low loss edge couplers, broadband directional couplers, high-extinction ratio polarization beam splitters (PBSs), and high-speed modulators are some of the devices within our library. In particular, we have designed and fabricated inverse taper fiber-to-waveguide edge couplers of tip widths ranging from 120 nm to 200 nm, and we obtained a low coupling loss of 1.80±0.28 dB for 160 nm tip width. To achieve polarization diversity operation for inverse tapers, we have experimentally realized different designs of polarization beam splitters (PBS). Our optimized PBS has a measured extinction ratio of ≤ 25 dB for both the quasiTE modes, and quasi-TM modes. Additionally, a broadband (100 nm) directional coupler with a 50/50 power splitting ratio was experimentally realized on a small footprint of 20×3 μm2 . Last but not least, high-speed silicon modulators with a range of carrier doping concentrations and offset of the PN junction can be used to optimise the modulation efficiency, and insertion losses for operation at 25 GHz.
We have successfully fabricated and measured our silicon bridge waveguide polarization beam splitter (PBS). Our proposed PBS is based on a bend directional coupler with a bend bridge waveguide and is experimentally realized using silicon waveguide thickness of 220 nm and 250 nm, which are the commonly used silicon thickness for silicon photonics manufacturing. Our experimental results demonstrated high extinction ratio of > 20 dB for the TE-like mode, and > 15 dB for the TM-like mode across a broad bandwidth of 90 nm that covers the entire C-band with a small footprint of ~18×9 μm2. On-chip high performance PBS is important for polarization diversity in integrated photonics, and for communication applications such as dual-polarization quadrature phase-shift keying (DP-QPSK) modulation.
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