Mr. Georgis Bulun Profile

Georgis Bulun

at Technical Univ. Kaiserslautern

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Publications (3)

Proceedings Article | 15 August 2023 Presentation + Paper

Construction of a time-domain full-field OCT for non-contact volumetric layer thickness measurement

Georgis Bulun, Marvin Lotz, Andrej Keksel, Gerhard Stelzer, Jörg Seewig

Proceedings Volume 12618, 126180S (2023) https://doi.org/10.1117/12.2673664

KEYWORDS: Optical coherence tomography, Refractive index, Coating thickness, Film thickness, Coating, Interferometry

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Proceedings Article | 3 October 2022 Presentation + Paper

Determination of the characteristics of a self-built coherence scanning interferometer with a universal calibration artefact

Matthias Eifler, Julian Hering, Georgis Bulun, Georg von Freymann, Jörg Seewig

Proceedings Volume 12223, 122230A (2022) https://doi.org/10.1117/12.2633483

KEYWORDS: Calibration, Metrology, Standards development, Light sources, Objectives, Manufacturing, Interferometers, Image quality, Beam splitters, Cameras

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Proceedings Article | 21 August 2020 Presentation + Paper

Performance specification of areal surface texture instruments exemplified by a self-built WLI

Georgis Bulun, Matthias Eifler, Julian Hering, Georg von Freymann, Jörg Seewig

Proceedings Volume 11490, 114900H (2020) https://doi.org/10.1117/12.2567666

KEYWORDS: Calibration, Metrology, Standards development, Light sources, Microscopes, Optical sensors

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The calibration of optical surface topography measuring instruments ensures the comparability of the resulting surface topographies. Such comparability is also desirable for self-built optical microscopes in order to optimize these instruments with regard to their systematic and stochastic measurement uncertainty. However, there is not yet a fixed set of standards in the field of interference microscopy as in the field of stylus instruments that describes methods for their calibration, verification, adjustment and performance specification [1] [2]. The associated standard for optical measuring instruments is still in preparation in the corresponding ISO working group. There is the guideline according to VDI/VDE 2655 Sheet 1.1, for the calibration of interference microscopes for surface texture measurement. This guideline is essentially a transfer of methods that origin from the calibration of stylus instruments [1]. Thus, it describes a profile-like calibration and does specifically consider areal properties of interference microscopes. The field of areal calibration is still work in progress in the international standardization. The ISO 25178-600 that was recently published defines the basic metrological characteristics of areal surface topography measuring instruments [3]. In our study, we describe the optimization and performance specification of a self-built white light interference microscope based on methods that were developed for instrument calibration. For the performance specification we use the metrological characteristics of ISO 25178-600 that are imaged with the help of a previously developed Universal Calibration Artefact for areal calibration [4]. The results of the metrological characteristics are compared with a commercially available white light interferometer (WLI). In order to improve the self-built interference microscope, the measurements are repeated with different configurations and a final setup is chosen that allows a specification of the performance of the self-built interference microscope for measuring areal surface texture.

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