Mr. Grant Davis Profile

Grant Davis

Technical Marketing Engineer at Siemens Industry Software Inc

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Publications (2)

Proceedings Article | 1 November 2007 Paper

A user-programmable link between data preparation and mask manufacturing equipment

Weidong Zhang, Grant Davis, Emile Sahouria, Steffen Schulze, Mohammed Saad, Arne Seyfarth, Eric Poortinga

Proceedings Volume 6730, 67304H (2007) https://doi.org/10.1117/12.746988

KEYWORDS: Metrology, Photomasks, Computer programming, Manufacturing, Interfaces, Manufacturing equipment, Databases, Visualization, Optical proximity correction, Data modeling

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Proceedings Article | 25 May 2007 Paper

Automated aerial image based CD metrology initiated by pattern marking with photomask layout data

Grant Davis, Sun Young Choi, Eui Hee Jung, Arne Seyfarth, Hans van Doornmalen, Eric Poortinga

Proceedings Volume 6607, 66072A (2007) https://doi.org/10.1117/12.728993

KEYWORDS: Photomasks, Image processing, Critical dimension metrology, Semiconducting wafers, Metrology, Design for manufacturing, Visualization, Lithography, Scanning electron microscopy, Interfaces

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