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Gregory Girard
Student at Ecole Polytechnique
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Publications (1)
Proceedings Article | 3 April 2003 Paper
Matrix-distributed ECR-PECVD for high-rate deposition of silica for applications in integrated optics
Gregory Girard, Dmitri Danieka, Pavel Bulkin, Jean-Eric Bouree
Proceedings Volume 4944, (2003) https://doi.org/10.1117/12.468294
KEYWORDS: Microwave radiation, Silica, Absorption, Hydrogen, Refractive index, Oxygen, Plasma, Ellipsometry, Antennas, Silicon
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