Dr. Gregory J. Kivenzor Profile

Dr. Gregory J. Kivenzor

Business & Technology Consultant at Bi-Focal Strategies LLC

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Publications (3)

Proceedings Article | 14 September 2001 Paper

Reduction of dose effects due to the transient absorption in fused silica at 193 nm

Gregory Kivenzor, Richard Guerra

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435739

KEYWORDS: Absorption, Silica, Optical components, Semiconducting wafers, Lithography, Wafer-level optics, Lithium, Transmittance, Projection systems, Control systems

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Proceedings Article | 26 April 2001 Paper

Dose metrology for DUV lithographic tools

Gregory Kivenzor, Richard Zimmerman

Proceedings Volume 4404, (2001) https://doi.org/10.1117/12.425228

KEYWORDS: Lithography, Sensors, Metrology, Deep ultraviolet, Calibration, Control systems, Manufacturing, Standards development, Optical lithography, Semiconductors

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Proceedings Article | 5 July 2000 Paper

Self-sustaining dose control system: ways to improve the exposure process

Gregory Kivenzor

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389077

KEYWORDS: Semiconducting wafers, Sensors, Control systems, Calibration, Lithography, Wafer-level optics, Reticles, Lithographic illumination, Detection and tracking algorithms, Semiconductors

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