Prof. Guifu Ding Profile

Prof. Guifu Ding

at Shanghai Jiao Tong Univ

SPIE Involvement:

Author

Publications (26)

SPIE Journal Paper | 1 January 2008 Open Access

Packaging of optical fibers using microfabricated nickel clamps

Xuhan Dai, Xiaolin Zhao, Guifu Ding, Hong Wang, Bingchu Cai

JM3, Vol. 7, Issue 01, 010501, (January 2008) https://doi.org/10.1117/12.10.1117/1.2896082

KEYWORDS: Silicon, Nickel, Optical fibers, Packaging, Electroplating, Semiconducting wafers, Microfabrication, Sputter deposition, Optical lithography, Single mode fibers

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SPIE Journal Paper | 1 April 2007

Micro-electromechanical systems variable optical attenuator based on nonsilicon surface micromachining technology

Xuhan Dai, Xiaolin Zhao, Guifu Ding, Bingchu Cai

JM3, Vol. 6, Issue 02, 023010, (April 2007) https://doi.org/10.1117/12.10.1117/1.2750653

KEYWORDS: Camera shutters, Signal attenuation, Microelectromechanical systems, Receivers, Silicon, Variable optical attenuators, Attenuators, Copper, Surface micromachining, Free space optics

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Proceedings Article | 1 December 2005 Paper

Microfabricated clamps for high-precision passive alignment and packaging of optical fibres in optoelectronics devices

Xuhan Dai, Xiaolin Zhao, Guifu Ding, Hong Wang, Bingchu Cai

Proceedings Volume 6019, 601909 (2005) https://doi.org/10.1117/12.637146

KEYWORDS: Optical fibers, Silicon, Nickel, Optical alignment, Packaging, Microfabrication, Optoelectronic devices, Optical lithography, Electroplating, Etching

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SPIE Journal Paper | 1 October 2005

Micromachined electromagnetic variable optical attenuator for optical power equalization

Xuhan Dai, Xiaolin Zhao, Guifu Ding, Bingchu Cai

JM3, Vol. 4, Issue 04, 041304, (October 2005) https://doi.org/10.1117/12.10.1117/1.2120648

KEYWORDS: Silicon, Electromagnetism, Signal attenuation, Variable optical attenuators, Microopto electromechanical systems, Optical fibers, Semiconducting wafers, Single mode fibers, Polarization, Optical alignment

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Proceedings Article | 30 December 2004 Paper

Electromagnetic MEMs eight-channel variable optical attenuator array

Xuhan Dai, Xiaolin Zhao, Guifu Ding, Bingchu Cai

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.574536

KEYWORDS: Silicon, Microelectromechanical systems, Electromagnetism, Signal attenuation, Magnetism, Variable optical attenuators, Optical arrays, Optical fibers, Polarization, Mechanics

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Proceedings Article | 10 September 2002 Paper

Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist

Jingquan Liu, Bingchu Cai, Jun Zhu, Di Chen, Yigui Li, Jiliang Zhang, Guipu Ding, Xiaolin Zhao, Chunsheng Yang

Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483159

KEYWORDS: Optical fibers, Optical alignment, Photoresist materials, Silicon, Adhesives, Lithography, Micro optics, Fiber optic communications, Optical switching, Optics manufacturing

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Proceedings Article | 10 September 2002 Paper

Pd/Ni bilayer electrochemical microactuator

Jinyuan Yao, Guifu Ding, Ying Cao, Chunsheng Yang, Tianhui Shen

Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483172

KEYWORDS: Microactuators, Hydrogen, Palladium, Plating, Electrodes, Copper, Microfabrication, Prototyping, Photomasks, Photoresist processing

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Proceedings Article | 10 September 2002 Paper

Microstructures of PMMA sheet fabricated by RIE

Longwang Huang, Chunsheng Yang, Guifu Ding

Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483173

KEYWORDS: Etching, Polymethylmethacrylate, Reactive ion etching, Oxygen, Anisotropy, Plasma, Ions, Fluorine, Plasma etching, Chemical species

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Proceedings Article | 19 April 2002 Paper

PMMA microstructures deep-etch process

A. Yu, Ai Liu, Chunsheng Yang, Guifu Ding

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462885

KEYWORDS: Etching, Polymethylmethacrylate, Ions, Nickel, Reactive ion etching, Plasma, Oxygen, Electrons, Particles, Photomasks

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