Dr. Pulikanti Guruprasad Reddy Profile

Dr. Pulikanti Guruprasad Reddy

at Indian Institute of Technology Mandi

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Publications (2)

Proceedings Article | 19 March 2018 Paper

Evaluation of high-resolution and sensitivity of n-CAR hybrid resist for sub-16nm or below technology node

Satinder Sharma, Mohamad Ghulam Moinuddin, Pulikanti Guruprasad Reddy, Chullikkattil Pradeep, Subrata Ghosh, Kenneth Gonsalves

Proceedings Volume 10583, 105831Q (2018) https://doi.org/10.1117/12.2297565

KEYWORDS: Electron beam lithography, Extreme ultraviolet lithography, Thin films, Lithography, Line edge roughness, Line width roughness, Tin, Resolution enhancement technologies, Photoresist developing, Atomic force microscopy

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Proceedings Article | 19 March 2018 Paper

Helium ion active hybrid non-chemically amplified resist (n-CAR) for sub-10 nm patterning applications

Satinder Sharma, Pulikanti Guruprasad Reddy, Mohamad Ghulam Moinuddin, Subrata Ghosh, Chullikkattil Pradeep, Kenneth Gonsalves

Proceedings Volume 10584, 1058409 (2018) https://doi.org/10.1117/12.2297537

KEYWORDS: Ions, Electron beam lithography, Monte Carlo methods, Helium, Thin films, Electrons, Line edge roughness, Lithography, Optical lithography, Line width roughness

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