We have developed a nanoscale strurctue measment system based on a digital micromirror device (DMD) based structured illumination microscopy (SIM) capable of wide-range and high-resolution imaging. The DMD based SIM yields the widefield images with the 20 different illumination patterns,a laser source with 349 nm wavelgnth, and a high sensitivity sCMOS camera the UV range. The developed image acquistion and reconstruct process can enhnace the imaging resolution under 150 nm and maximize the imaging area. In order to find practical applications of the SIM system, we prepared metallic nano pattern samples fabricated using FIB milling process and PET film samples fabricated using nano imprinting process that sample has nanohole structure with a diameter of 150 nm. The DMD based SIM system can reconstruct the nanostructure image with an large area and the obtained SIM images were compared with the SEM result to verify the improved resolution.
The effective confinement of light in a deep-subwavelength volume can be achieved in metallic nanostructures through the electronic resonance, surface plasmons (SPs). There are few ways to enhance the localization of the field such as adopting metallic nanopost or nanowire structures on the precious metallic film. The achieved highly enhanced field localization through SPs can be exploited for surface-enhanced spectroscopy, biosensor, enhancing energy emitter, and enhanced energy generator. Also, many researches have been tried with few-nanometer gap between the metals for achieving large field enhancements. In this paper, by comparing the scattering of gold nanoparticles, the effects of metallic film of substrates were investigated through simulation. In addition, as changing of the gap between gold nanoparticle and metallic surface, different resonance wavelengths were observed in scattering spectra from simulation and practical experiments. We confirmed that the gold film with gold nanoparticles shows the most distinctive scattering spectra. The numerical demonstration was matched with our experimental demonstration, also with the previously introduced papers as well.
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