This paper describes a liquid crystal (LC) device for three dimensional profile measurement systems which are based on grating projection method using phase shifting technique. As a key component to these sytems, we propose to apply a liquid crystal (LC) grating instead of a conventional ruled grating because the grating ruled on the glass plate has difficulty in speedy and accurate shifting of the pattern. This LC grating consists of 960 lines of stripe pattern on the substrate of 60x40 mm2 in size and has such features as 8 bits of gray levels in dynamic range for mono-chromatic usage. A sinusoidal pattern as well as a binary pattern is realized by combining pulse width modulation control (PWMC) and frame ratio control (FRC) technique. The period of the pattern is arbitrarily controlled and, in addition, shifting of the projected pattern is also electrically realized. We present properties of the LC grating we have developed and demonstrate a few examples obtained by the system which has this LC grating built in.
This paper describes a device for 3D profile measurement systems which are based on grating projection method using phase shifting technique. As a key component to these systems, we propose to apply a liquid crystal (LC) grating instead of a conventional ruled grating which has difficulty in speedy and accurate shifting of the projected pattern. This LC grating consists of 960 lines of stripe pattern on the substrate of 60×40 mm2 in size and has such features as 8 bits of gray levels in dynamic range in mono-chromatic usage. A sinusoidal pattern as well as a binary pattern is realized by combining pulse width modulation control (PWMC) and frame ratio control (FRC) technique. The period of the pattern is arbitrarily controlled and, in addition, shifting of the projected pattern is also electrically realized. We demonstrate a few examples measured by the system which has this LC grating built in.
This paper describes a device for 3D profile measurement systems, which are based on grating projection method using phase shifting technique for fringe analysis. As a key component of these systems, we propose to apply a liquid crystal (LC) grating instead of a conventional ruled grating, which has difficulty in speedy and accurate shifting of the projected pattern. This LC grating consists of 960 lines of stripe pattern on the substrate of 60×40 mm2 in size and has such features as 8 bits of gray levels in dynamic range in use of mono-chromatic applications. A sinusoidal pattern as well as a binary pattern in realized by combining pulse width modulation control and frame ratio control technqiue. In addition, the period of the pattern is arbitrarily controlled and shifting of the projected pattern is also electrically realized. We demonstrate a few examples measured by the system which uses this LC grating inside.
This paper discusses a novel device for measuring 3D-surface profiles of objects using a grating pattern projection method. In particular, the configuration of a grating pattern generating and image processing system for calculating phase distribution from deformed grating images are described. In the grating pattern generating system, the grating is made from a liquid crystal (LC) with a stripe structure pattern which is driven by a pulse width modulation method. The intensity distribution made by the stripe LC grating is set to be triangular. The triangular distribution will be realized using low-bit gray levels. For instance, less than 11 gray levels will produce two patterns which is phase shifted by 1/4cycles; then, projection onto an object can be achieved twice. The deformed grating images posed by the object are detected by a CCD camera in the form of a two-phase image. The image processing system transforms the intensity distribution of the two-phase image into phase distribution which corresponds to the profile of the object. In this operation, linear regions are chosen where the intensities of the two-phase image change linearly by selecting the two-phase image alternately. The one cycle period is formed with four linear regions (quadrant), and the phase width in each quadrant is set to be π/2. Because the intensity distribution in the linear regions varies depending on the profile of the object, the phase distribution in each region is calculated using a simple linear operation using intensity variations or pixel number data.
This paper discuses an apparatus used in industrial inspection for optically detecting dimensions. In particular, the configuration of optical unit with compact in size and simpler in construction, and signal processing unit with resolution to be better than 0.1 micrometers are described. The key devices of the new optical unit are optical scale and light source. The optical scale consists of one moving and two stationary gratings. Both of these gratings have different pitch lengths. For example, the pitch of the moving and stationary gratings are 50 micrometers and 10 micrometers , respectively. These pitches are set to odd integer multiples. The optical scale, directly irradiated by a divergent light emitted from a laser diode, generates two sinusoidal signals with a 10 micrometers period. By using the divergent light, the need for a collimating lens is eliminated. This reduces the overall size of the optical unit. The signal processing unit operates on the two signals for detecting the signal phase at the stop position of the moving grating. The basis of this phase detection is a simpler linear operation. By using the linear operation, high resolution detection of the signal phase is accomplished by segmenting an interval of one cycle period of the signal into more than 300 parts.
This paper describes a grating projection method for the measurement of surface profiles of objects. In this kind of profilometry, a grating with binary transmittance distribution has been utilized usually. And in these cases such a problem is known as an error is caused due to the non-sinusoidal transmittance distribution of the grating. And another difficulty is also indicated that shifting of the grating is given by mechanical movement of the grating. Here we propose to use a hybrid grating is given by mechanical movement of the grating. Here we propose to us a hybrid grating which consists of a conventional binary grating and a liquid crystal binary grating. Then moire pattern is produced by superposing these two binary gratings. When two binary gratings are overlapped with an appropriate gap, the resultant more pattern becomes closely sinusoidal in intensity distribution. The, in the optical arrangement for profile measurement using this hybrid grating, when the LC gratin pattern is moved, the projected pattern is shifted arbitrarily in phase. Surface profiles of some samples are measured to show validity of the more pattern projection and utility of the prototype system.
This paper describes a device for measuring the three dimensional surface profile using a grating projection method. A phase shifting technique without any mechanical moving is expected for profile analysis. A grating that is a key component in this technique is made using an active controlled liquid crystal (LC). This LC grating has the performances of more than 8 bits of gray levels and its grating period is 50 micro-meters per line without any colored filters. Surface profiles of some samples are measured for the demonstration of the system.
A construction of surface profile measurement system for measuring lateral and vertical dimensions of submicron to micron size and its applications to industrial inspection are described. This system includes a laser scanning microscopy (LSM) and an optical heterodyne interferometry (OHI) functions in one and the same optical device. These two functions are used individually depending on the purpose of the measurement. OHI measures vertical dimensions, LSM measures lateral dimensions. The selection of the functions is performed by changing the intensity distribution of the probe light beam falled on a sample and signal processing system of the reflected light beam.
A surface height variation measurement device based on the differential heterodyne interferometric scheme using new optical beam scanning techniques is described. An acousto- optic deflector (AOD) is driven by a signal which has two frequency components to generate two first-order diffraction beams at different frequencies for the probing light beams. The two beams, which have only a slight separation, are deflected by the AOD. The scanning distance of the two beams via the AOD can be extended using a Galvano mirror, which is driven synchronized with the AOD and scans the two beams in the same direction. The scanning direction of the two beams can be changed in various directions in the two-dimensional plane using a specially made rotating prism. The difference in surface height between the points where the two beams are incident is detected from the phase change of a beat signal with accuracies on the order of 1 nm. We applied this device to surface condition measurements, such as surface roughness, shape, and fine angle.
A novel image scanning technique, the pulse counting method, has been
developed for geometric parameter measurement of optical fibers. The theory
and implement of this technique are described. Experimental results show that the
resolution and the repeatability of the system with this technique are O.OO5pm
and O.lpm (3a) , respectively.
Indexing Words: Image Scanning; Geometric Measurement; Optical Fibers;
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