This paper reports our recent fabrication effort in producing suspended-silicon-nanowire based static sensors, which is an
extension to our previous theoretical and numerical studies. The static sensor consists of four suspended silicon dioxide
microwires and one silicon dioxide microplate. Each side of the microplate includes two silicon dioxide microwires,
instead of one, to avoid the possible torsion of the microplate and make the microplate remain parallel to the substrate
before detection. Most of the bridges are curved, instead of being straight, as simulated with the FEA software
previously. Silicon dioxide microbridges were fabricated, and gold/Ni was deposited on the bridge surface. The resulting
deflection was observed with Roughness Step Tester (RST).
A new thinning and trimming approach has been explored to produce silicon nanowires (SiNWs) from silicon
microwires. One-dimensional nanostructures have attracted great attention recently because of their potential
applications as excellent components in micro/nanodevices. SiNWs in particular have received much attention since
silicon is the most widely used material in integrated-circuit and microfabrication processes and has unique mechanical
and electrical properties. However, due to the shortcomings of the existing fabrication approaches, new methods are
needed to produce SiNWs that can not only be massively fabricated but also batch integrated to functional devices. The
developed thinning and trimming approach is believed to be such a method, and would permit precise control of the
structure, size and positions of SiNWs. Furthermore, this method may be used to break through the limitation of
lithography in the sense that silicon features fabricated by any lithographic methods can be further miniaturized using
this approach. Our progress on developing this new thinning and trimming approach is detailed in this paper.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.