Mr. Hyun Young Kim Profile

Hyun Young Kim

at Hynix Semiconductor Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 15 May 2007 Paper

Evaluation of litho printability of DRAM contact hole patterns with various programmed defects

KangJoon Seo, SangIee Lee, HyunYoung Kim, DaeHo Hwang, Sangpyo Kim, Goomin Jeong, Oscar Han, Chunlin Chen, David Yee, EunJi Kim, KiHun Park, NamWook Kim, Sunny Choi, David Kim, Shrinkant Lohokare

Proceedings Volume 6607, 66072D (2007) https://doi.org/10.1117/12.728996

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Reticles, Tolerancing, Scanning electron microscopy, Lithography, Manufacturing, Printing, Critical dimension metrology

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Proceedings Article | 20 October 2006 Paper

Optimization of development process using after develop inspection in mask manufacturing

Hyun Young Kim, Dae Ho Hwang, Sang Pyo Kim, Oscar Han, Ki Hun Park, Nam Wook Kim, David Kim

Proceedings Volume 6349, 63493Q (2006) https://doi.org/10.1117/12.702033

KEYWORDS: Inspection, Antimony, Etching, Algorithm development, Calibration, Defect detection, Chromium, Reflectivity, Critical dimension metrology, Photomasks

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