Dr. Imelda P. Keen Profile

Dr. Imelda P. Keen

Research Fellow at Univ of Queensland

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Publications (3)

Proceedings Article | 21 March 2012 Paper

EUVL compatible LER solutions using functional block copolymers

Han-Hao Cheng, Imelda Keen, Anguang Yu, Ya-Mi Chuang, Idriss Blakey, Kevin Jack, Michael Leeson, Todd Younkin, Andrew Whittaker

Proceedings Volume 8323, 83231O (2012) https://doi.org/10.1117/12.916744

KEYWORDS: Line edge roughness, Extreme ultraviolet lithography, Picosecond phenomena, Polymers, Lithography, Directed self assembly, Photoresist materials, Etching, Glasses, Reactive ion etching

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Proceedings Article | 4 April 2011 Paper

Electron beam induced freezing of positive tone, EUV resists for directed self assembly applications

Han-Hao Cheng, Imelda Keen, Anguang Yu, Ya-Mi Chuang, Idriss Blakey, Kevin Jack, Michael Leeson, Todd Younkin, Andrew Whittaker

Proceedings Volume 7970, 79701V (2011) https://doi.org/10.1117/12.881491

KEYWORDS: Electron beam lithography, Annealing, Double patterning technology, Extreme ultraviolet, Line edge roughness, Electron beams, Directed self assembly, Scanning electron microscopy, Extreme ultraviolet lithography, Photoresist materials

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Proceedings Article | 31 October 2001 Paper

Raman mapping of plasma-treated and grafted polymer surfaces

Peter Fredericks, Imelda Keen, Llewellyn Rintoul

Proceedings Volume 4469, (2001) https://doi.org/10.1117/12.447372

KEYWORDS: Raman spectroscopy, Plasma treatment, Polymers, Crystals, Picosecond phenomena, Plasma, Oxygen, Particles, Spectroscopy, Chemistry

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