Mr. James L. Wood Profile

James L. Wood

Manager of Product at Rigaku Innovative Technologies Inc

SPIE Involvement:

Author

Proceedings Article | 17 December 2003 Paper

Initial results of new photomask-blank deposition tool

Michael Kriese, James Rodriguez, Yuriy Platonov, James Wood

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518314

KEYWORDS: Multilayers, Photomasks, Extreme ultraviolet, Thin films, Thin film coatings, Ions, Particles, Reflectivity, Ion beams, Sputter deposition

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Proceedings Article | 28 August 2003 Paper

Initial capability of new photomask-blank deposition tool

Michael Kriese, James Wood, James Rodriguez, Gary Fournier, David Thompson, David Mercer, Jason Gass, Dale Mauldin

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504179

KEYWORDS: Multilayers, Photomasks, Extreme ultraviolet, Thin films, Thin film coatings, Particles, Reflectivity, Ions, Ion beams, Sputter deposition

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Proceedings Article | 13 November 1998 Paper

Design of a LIGA beamline using a multilayer-coated reflection mirror

Hiroo Kinoshita, Yachiyo Kimpara, T. Uruga, Takeo Watanabe, Masahito Niibe, Yuriy Platonov, James Wood

Proceedings Volume 3447, (1998) https://doi.org/10.1117/12.331117

KEYWORDS: Mirrors, Reflectivity, Multilayers, Platinum, Coating, X-rays, Reflection, X-ray lithography, Silicon carbide, X-ray optics

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Proceedings Article | 1 November 1997 Paper

Deposition of x-ray multilayers on long-size substrates for synchrotron applications

Yuriy Platonov, David Broadway, Brian DeGroot, Boris Verman, Bonglea Kim, George Gutman, James Wood, James Rodriguez, Nicola Grupido

Proceedings Volume 3152, (1997) https://doi.org/10.1117/12.295561

KEYWORDS: Multilayers, Mirrors, Reflectivity, Coating, Silicon, X-rays, Silicon carbide, Angiography, Synchrotrons, Sputter deposition

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SPIE Journal Paper | 1 January 1995

Grazing incidence Fe-line telescopes using W/B₄C multilayers

Karsten Joensen, Paul Gorenstein, Finn Christensen, George Gutman, James Wood

OE, Vol. 34, Issue 01, (January 1995) https://doi.org/10.1117/12.10.1117/12.188342

KEYWORDS: Multilayers, Telescopes, Reflectors, Coating, Gold, Space telescopes, Reflector telescopes, X-ray telescopes, Reflectivity, Reflection

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Proceedings Article | 11 November 1994 Paper

Preliminary results of a feasibility study for a hard x-ray Kirkpatrick-Baez telescope

Karsten Joensen, Paul Gorenstein, James Wood, Finn Christensen, Peter Hoghoj

Proceedings Volume 2279, (1994) https://doi.org/10.1117/12.193133

KEYWORDS: Multilayers, Telescopes, Reflectors, Space telescopes, Reflectivity, X-ray telescopes, Hard x-rays, Reflector telescopes, Grazing incidence, Polishing

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Proceedings Article | 7 November 1994 Paper

Prospects for supermirrors in hard x-ray spectroscopy

Karsten Joensen, Paul Gorenstein, Finn Christensen, Peter Hoghoj, Eric Ziegler, Jean Susini, Andreas Freund, D. Siddons, James Wood

Proceedings Volume 2283, (1994) https://doi.org/10.1117/12.193181

KEYWORDS: Reflectivity, Hard x-rays, X-rays, Multilayers, Absorption, X-ray optics, X-ray telescopes, Interfaces, Reflection, Synchrotrons

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Proceedings Article | 4 November 1994 Paper

Multilayer supermirrors: broad-band reflection coatings for the 15 to 100 keV range

Karsten Joensen, Paul Gorenstein, Finn Christensen, P. Hoeghoej, Eric Ziegler, Jean Susini, Andreas Freund, James Wood

Proceedings Volume 2253, (1994) https://doi.org/10.1117/12.192082

KEYWORDS: Reflectivity, Multilayers, Hard x-rays, Absorption, X-rays, Optical coatings, Interfaces, Synchrotrons, Astrophysics, Reflection

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Proceedings Article | 1 February 1994 Paper

Multilayered supermirror structures for hard x-ray synchrotron and astrophysics instrumentation

Karsten Joensen, Peter Hoghoj, Finn Christensen, Paul Gorenstein, Jean Susini, Eric Ziegler, Andreas Freund, James Wood

Proceedings Volume 2011, (1994) https://doi.org/10.1117/12.167210

KEYWORDS: Reflectivity, Multilayers, Coating, Hard x-rays, X-rays, Reflectors, Absorption, Synchrotrons, Reflection, X-ray optics

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Proceedings Article | 3 February 1993 Paper

Medium-sized grazing incidence high-energy x-ray telescopes employing continuously graded multilayers

Karsten Joensen, Finn Christensen, Herbert Schnopper, Paul Gorenstein, Jean Susini, Peter Hoghoj, Robert Hustache, James Wood, K. Parker

Proceedings Volume 1736, (1993) https://doi.org/10.1117/12.140479

KEYWORDS: Multilayers, Reflectivity, Telescopes, X-ray telescopes, Reflectors, Gold, X-rays, X-ray detectors, Grazing incidence, Physics

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Proceedings Article | 21 January 1993 Paper

New method for achieving accurate thickness control for uniform and graded multilayer coatings on large flat substrates

George Gutman, John Keem, Kevin Parker, James Wood, Richard Watts, Charles Tarrio

Proceedings Volume 1742, (1993) https://doi.org/10.1117/12.140602

KEYWORDS: Multilayers, Mirrors, Sputter deposition, X-rays, Photomasks, Silicon, Optical coatings, Calibration, X-ray diffraction, X-ray optics

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Proceedings Article | 21 January 1993 Paper

Improved thermal stability of sputtered W/C multilayer thin films

Jesus Gonzalez-Hernandez, Benjamin Chao, A. Chan, J. Gavulic, Stanford Ovshinsky, James Wood

Proceedings Volume 1742, (1993) https://doi.org/10.1117/12.140608

KEYWORDS: Multilayers, Annealing, Raman spectroscopy, Carbon, Silicon, Scanning electron microscopy, Crystals, Sputter deposition, Oxygen, Oxidation

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Proceedings Article | 23 November 1992 Paper

Status of supermirror research at OSMC

James Wood

Proceedings Volume 1738, (1992) https://doi.org/10.1117/12.130616

KEYWORDS: Reflectivity, Titanium, Multilayers, Silicon, Ion beams, Optical components, Nickel, Iron, Argon, Scattering

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Proceedings Article | 1 January 1992 Paper

New method of manufacturing elastically bent crystals and multilayer mirrors

George Gutman, James Wood

Proceedings Volume 1546, (1992) https://doi.org/10.1117/12.51219

KEYWORDS: Crystals, Spectroscopy, Grazing incidence, X-ray optics, Manufacturing, Mirrors, Glasses, Zinc, Sensors, Spectral resolution

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Proceedings Article | 1 January 1992 Paper

Graded d-spacing multilayer telescope for high-energy x-ray astronomy

Finn Christensen, Allan Hornstrup, Niels Westergaard, Herbert Schnopper, James Wood, Kevin Parker

Proceedings Volume 1546, (1992) https://doi.org/10.1117/12.51230

KEYWORDS: Multilayers, Coating, Reflection, Reflectivity, X-ray telescopes, X-rays, Glasses, Copper, Silicon, Gold

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Proceedings Article | 1 January 1992 Paper

Method for characterizing multilayer coatings on curved substrates

George Gutman, Kevin Parker, James Scholhamer, James Wood

Proceedings Volume 1546, (1992) https://doi.org/10.1117/12.51216

KEYWORDS: Multilayers, Mirrors, Mica, Spherical lenses, Reflectivity, X-ray optics, Copper, Optical coatings, Silicon, Manufacturing

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Proceedings Article | 1 January 1992 Paper

Structural changes induced by thermal annealing in W/C multilayers

Benjamin Chao, Jesus Gonzalez-Hernandez, D. Pawlik, Stanford Ovshinsky, James Scholhamer, James Wood, Kevin Parker

Proceedings Volume 1547, (1992) https://doi.org/10.1117/12.51280

KEYWORDS: Annealing, Multilayers, Crystals, Tungsten, X-ray optics, Interfaces, X-rays, Silicon, Carbon, Argon

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Tungsten/carbon (W/C) multilayer thin films with a nominal d spacing varying from 2.5 to 14 nm were prepared by magnetron sputtering technique. The thicknesses of the W and C layers were varied from 0.5 to 12 nm. The multilayers were subjected to isochronal anneals in a quartz tube furnace in the range of 300 to 1000 C under high purity Ar flow conditions. X-ray diffraction, Raman scattering and Auger depth profiling were used to characterize the structure of the as-prepared and annealed films. It is found that an overcoat layer of silicon nitride (30-50 nm) prevents the multilayers from oxidation during the 1 hr heat treatment at temperatures as high as 1000 C in Ar flow. In all studied W/C multilayers, the carbon layers are amorphous (up to 12 nm). The tungsten layers are also amorphous when their thicknesses are less than 5 nm. Tungsten layers thicker than 5 nm show crystalline W peaks in addition to the amorphous W feature. Annealing of samples with a silicon nitride protective layer results in several structural changes which depend on annealing temperature, d spacing, the as-deposited W layer structure and the layer thickness ratio of W to C. For W layer thicker than C layer and W layer thickness > 4 nm and/or C layer thickness < 1 nm, the multilayers show the initial crystal formation of microcrystalline W2C occurring at C-W interfaces (that interface in which C was deposited on W) after 600 C anneal, followed by a second crystallization of a-W or a-W and WC at W-C interfaces (W was deposited on C) at the annealing temperature of 900 C. They reveal a relatively small (< 5 %) or essentially no layer expansion. For those multilayers having thin W layers (2 nm) and the same or thicker C layer thicknesses, the initial crystallization takes place at both W-C and C-W interfaces at 900 C or higher. The crystal formed is a-W or a-W and WC. The layer pair period of the multilayers in this group increases monotonically with increasing annealing temperature. Expansion is up to 16 % of the original d spacing and occurs in both W and C layers at approximately equal rates. The expansion in all multilayers is interpreted to be associated mainly with the structural ordering processes in the amorphous W and C layers.