Jean-Paul E. Sier
Applications Engineer at KLA Corp
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 14 October 2011 Paper
Dan Hung, Domingo Morales, Juan Pablo Canepa, Stephen Kim, Po Liu, Jean-Paul Sier, Patrick LoPresti
Proceedings Volume 8166, 81660R (2011) https://doi.org/10.1117/12.896964
KEYWORDS: Inspection, Data conversion, Data processing, Databases, Manufacturing, Explosives, Neodymium, Polonium, Photomask technology, Current controlled current source

Proceedings Article | 2 May 2008 Paper
Proceedings Volume 6792, 67920I (2008) https://doi.org/10.1117/12.798601
KEYWORDS: Inspection, Reticles, Databases, Defect detection, SRAF, 3D modeling, Data modeling, Image transmission, Logic, Optical proximity correction

Proceedings Article | 16 November 2007 Paper
Heiko Schmalfuss, Thomas Schulmeyer, Jan Heumann, Michael Lang, Jean-Paul Sier
Proceedings Volume 6730, 673025 (2007) https://doi.org/10.1117/12.747164
KEYWORDS: Inspection, Contamination, Photomasks, Defect detection, Databases, Defect inspection, Stereolithography, Modulation, Environmental sensing, Quartz

Proceedings Article | 25 October 2007 Paper
Proceedings Volume 6730, 67302A (2007) https://doi.org/10.1117/12.747295
KEYWORDS: Inspection, Reticles, Databases, Defect detection, SRAF, 3D modeling, Data modeling, Logic, Image transmission, Optical proximity correction

Proceedings Article | 15 May 2007 Paper
Proceedings Volume 6607, 66072C (2007) https://doi.org/10.1117/12.728995
KEYWORDS: Inspection, Defect detection, Contamination, Reticles, Photomasks, Defect inspection, Detection and tracking algorithms, Stars, Dysprosium, Optical properties

Showing 5 of 8 publications
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