Bragg reflecting waveguide devices are fabricated on a flexible substrate by using a post lift-off process in order to
provide highly uniform grating patterns on a wide range. In this process, the flexible substrate spin-coated on silicon
wafer is released after the final fabrication process of chip dicing. The fabricated flexible Bragg reflector shows very
sharp transmission spectrum with 3-dB bandwidth of 0.1 nm and 10-dB bandwidth of 0.4 nm, which proves the Bragg
reflector has excellent uniformity. To achieve athermal operation of the flexible Bragg reflector, thermal expansion
property of the plastic substrate is controlled by the thickness of two polymer materials constructing the plastic substrate.
The flexible substrate with 0.7-μm SU-8 layers sandwiching 100-μm NOA61 layer provides an optimized thermal
expansion property to compensate the thermo-optic effect of the waveguide made of ZPU polymer. The temperature
dependence of the Bragg reflector is decreased to -0.011 nm/°C through the incorporation of the plastic substrate.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.