Mr. Jeonghoon Lee Profile

Jeonghoon Lee

at KLA Corp

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Device overlay root cause process detection using patterned wafer geometry information

Sejung Ham, Youngkwang Song, Cheolwoo Lee, Mingyu Kim, Minsung Hyun, Sunghyun Park, Moonsoup Kim, Jeonghoon Lee, Nanglyeom Oh, Sunglyul Park, Dongsub Choi

Proceedings Volume 12955, 129551D (2024) https://doi.org/10.1117/12.3008290

KEYWORDS: Semiconducting wafers, Overlay metrology, Optical alignment, Vacuum chambers, Lithography, Scanners, Optical parametric oscillators, Process control, Error analysis, 3D metrology

Read Abstract +

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

Advanced CD uniformity correction using radial basis function (RBF) models

Philip Groeger, Ulrich Denker, Robin Zech, Stefan Buhl, Matthias Ruhm, Mingyu Kim, Hongseok Jang, Chunsoo Kang, Dongyoung Lee, Hyunjun Kim, Sukwon Park, Bohye Kim, Honggoo Lee, Sangho Lee, Dongsub Choi, Jeonghoon Lee

Proceedings Volume 12053, 1205314 (2022) https://doi.org/10.1117/12.2607571

KEYWORDS: Semiconducting wafers, Data modeling, Scanners, Critical dimension metrology, Performance modeling, Mathematical modeling, Etching, Error analysis, Algorithm development, Zernike polynomials, Modeling, Modeling and simulation

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years