Dr. Jiahao Zhao Profile

Dr. Jiahao Zhao

Research Specialist at Tsinghua Univ

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Publications (1)

Proceedings Article | 30 December 2008 Paper

A smart resonating micro-cantilever in MEMS gas sensor: improved design

Jia Hao Zhao, Shi Jie Yu, Ke Li, Qin Zhou, Zheng You

Proceedings Volume 7268, 72680T (2008) https://doi.org/10.1117/12.810579

KEYWORDS: Microelectromechanical systems, Gas sensors, Sensors, Computer simulations, Actuators, Adsorption, Silicon, Electrodes, Scanning electron microscopy, Beam analyzers

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